Cryopump CRYO-U series
ULVAC Sales Co., Ltd.

About This Product

■SummaryULVAC Cryo has been used in many fields such as electronics, optics, solar energy, nuclear fusion, space development, and has accumulated a proven track record. We have standard models from 4 inches to 30 inches in diameter.

■Applications・Vacuum deposition equipment
・Nuclear fusion device
・Sputtering equipment
・Surface analysis device
・Ion implantation equipment
・Space chamber
・Semiconductor process equipment
・Accelerator
・Other equipment that requires clean high vacuum or extremely high vacuum

■Features・Provides a clean vacuum that cannot be obtained with other pumps.
・All gases can be exhausted.
・Since liquid nitrogen is not required, it can be used at low running costs.
- Can be installed in any direction.
- Compact design and lightweight.
-Easy to operate.
・Higher pumping speed can be obtained compared to ion pumps and turbomolecular pumps.

■For a wide range of applications・Large exhaust capacity type for sputtering equipment
・Corrosion-resistant type for etching, CVD equipment, etc.
・Bakeable type for extremely high vacuum use
・Low vibration type for analytical instruments, experimental equipment, etc.

■OthersFurthermore, we have a wide range of options such as band heaters, cryo thermometers that are resistant to noise, super traps for exhaust when there is a lot of moisture, and automatic regeneration devices. Since our products are integrated into our customers' important production lines, we have set up a service system that can quickly respond to their needs from over 30 service bases nationwide, and we strive to ensure customer satisfaction.

Model
There is 1 model available for this product.

Product
Cryopump CRYO-U series

Handling Company
ULVAC Sales Co., Ltd.

Categories

Pumps

Vacuum Pumps

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1 Models of Cryopump CRYO-U series

Image	Part Number	Price (excluding tax)	Mass	Maximum flow rate	Pumping speed (20℃)	Exhaust capacity	Intake flange	Ultimate pressure	Cooling down time (power cycle)	Compressor unit (water cooling)
	CRYO-U4H	Available upon quote	14.5 kg	Argon: 1.3×10^3 Pa・L/s	Nitrogen: 450L/s Hydrogen: 500L/s Argon: 370L/s Water: 1,100L/s	Argon: 1.0×10^7 Pa・L Hydrogen: 1.5×10^5 Pa・L	ISO-K,DN100	10^-7 Pa	50Hz: 45min 60Hz: 40min	C10

Image

Part Number

Price (excluding tax)

Mass

Maximum flow rate

Pumping speed (20℃)

Exhaust capacity

Intake flange

Ultimate pressure

Cooling down time (power cycle)

Compressor unit (water cooling)

CRYO-U4H

Available upon quote

14.5 kg

Argon: 1.3×10^3 Pa・L/s

Nitrogen: 450L/s
Hydrogen: 500L/s
Argon: 370L/s
Water: 1,100L/s

Argon: 1.0×10^7 Pa・L
Hydrogen: 1.5×10^5 Pa・L

ISO-K,DN100

10^-7 Pa

50Hz: 45min
60Hz: 40min

C10

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Japan

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Cryopump CRYO-U series ULVAC Sales Co., Ltd.

About This Product

■Summary

■Applications

■Features

■For a wide range of applications

■Others

1 Models of Cryopump CRYO-U series

CRYO-U4H

Customers who viewed this product also viewed

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

Related search keywords

Cryopump CRYO-U series
ULVAC Sales Co., Ltd.