Ceramic ball bearing type turbomolecular pump UTM300B-UTM300B

Ceramic ball bearing type turbomolecular pump UTM300B
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■SummaryThis is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrating the controller and pump. The excellent high back pressure characteristics also make it possible to downsize the auxiliary pump.

■Applications・Main exhaust system for analysis equipment, research and development equipment, experimental equipment, etc.
・Main exhaust system for vapor deposition equipment, sputtering equipment, etc.
・Main exhaust system for light gases such as H2 and He

■Free installation directionSince there are no restrictions on the mounting direction, there is greater freedom in device design.

■Equipped with onboard controllerThe controller is mounted on the turbo body, which is effective in reducing wiring and downsizing the exhaust system.

■High compression ratio/high back pressureIt has a high compression ratio and can operate with high back pressure, making it possible to downsize the auxiliary pump.

■3 types of flanges availableThree types of intake flange can be selected: VG100, ICF152, and ISO100-K.

■Clean vacuumThe pump is designed to minimize backflow of hydrocarbons not only during operation but also when the pump is stopped.

■Low noiseThe noise level during no-load operation is less than 50dB. (Measurement values ​​for ISO-100K flange type)

■Compliant standardsCE, NRTL compliant

Model
There are 1 models for this product.

Product
Ceramic ball bearing type turbomolecular pump UTM300B

Handling Company
ULVAC Sales Co., Ltd.

Categories

Pumps

Vacuum Pumps

Pumps

Axial Flow Pumps

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1 Models of Ceramic ball bearing type turbomolecular pump UTM300B

Image	Part Number	Price (excluding tax)	Noise *10	Continuous operation maximum flow rate without gas purge N2	Maximum flow rate for continuous operation Without gas purge Ar	Continuous operation maximum flow rate With gas purge Ar	Startup time (up to 80%)	Mass VG,ISO/ICF	Surface treatment *9	Standard accessories	Maximum outlet pressure	Maximum compression ratio	Maximum inlet pressure	Recommended auxiliary pump (at 10SCCM suction) *8	Exhaust speed (without protective net)	Exhaust port side flange	Number of revolutions	Inlet side flange *1	Installation direction	Ultimate pressure (when using two-stage auxiliary pump) After baking	Ultimate pressure (when using two-stage auxiliary pump) Before baking	Cooling method
	UTM300B	Available upon quote	Less than 50dB (A) *10 ISO flange type. Based on our measurement method.	Natural air cooling: 10sccm Forced air cooling: 100sccm	Forced air cooling: 30sccm	Forced air cooling: 40sccm	3.5 minutes (DC24V, back pressure 5Pa or less)	Natural air cooling: 6kg/9kg Forced air cooling: 6.3kg/9.3kg	None *9 Do not flow reactive gas, corrosive gas, or gas containing Ga. Please contact us for other gases.	Instruction manual (both Japanese and English), protective net cap (VG, ICF only, ISO flange built into gasket), Gasket (for intake port), dust cap (for intake port, exhaust port, connector) 1 each	Natural air cooling: 100Pa Forced air cooling: 1,000Pa	N2:>1×10^9, He:7×10^6, H2:1×10^5	Natural air cooling: 0.06Pa Forced air cooling: 0.7Pa	120L/min or more *8 If the amount of gas is large, select an auxiliary pump that will keep the exhaust port pressure below the maximum exhaust port pressure.	N2:280 L/s He:270 L/s H2:220 L/s	KF16	60,000rpm	VG100,ICF152,ISO100-K *1 Please select from VG100, ICF152, ISO100-K when ordering.	Omnidirectional	Natural air cooling:2 Forced air cooling: 10^-8Pa 2 Baking can only be performed when using forced air cooling of the ICF flange.	Natural air cooling: 10^-6Pa Forced air cooling: 10^-6Pa	Natural air cooling forced air cooling

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

Japan

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Ceramic ball bearing type turbomolecular pump UTM300B ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

About This Product

■Summary

■Applications

■Free installation direction

■Equipped with onboard controller

■High compression ratio/high back pressure

■3 types of flanges available

■Clean vacuum

■Low noise

■Compliant standards

1 Models of Ceramic ball bearing type turbomolecular pump UTM300B

UTM300B

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Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

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Ceramic ball bearing type turbomolecular pump UTM300B
ULVAC Sales Co., Ltd.