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  4. Controller-integrated turbo molecular pump UTM-MI series (ULVAC Sales Co., Ltd.)
Controller-integrated turbo molecular pump UTM-MI series-UTM-MI series
Controller-integrated turbo molecular pump UTM-MI series-ULVAC Sales Co., Ltd.

Controller-integrated turbo molecular pump UTM-MI series
ULVAC Sales Co., Ltd.

About This Product

■Summary

A turbo molecular pump with integrated controller that uses magnetic bearings. By integrating the pump body and controller, wiring and space savings have been realized.

■Vacuum main exhaust system for various equipment

・Semiconductor manufacturing equipment ・Vapor deposition equipment ・Sputtering equipment ・Analyzer ・Experimental equipment, etc. ・Research and development equipment

■Applications

・Main exhaust system for light processes that does not generate side reaction products ・Replacement from equipment equipped with oil diffusion pump ・Other general high vacuum exhaust applications

■Pump body and controller are integrated

No need for troublesome wiring between the pump body and controller.

■Free installation direction

Since there are no restrictions on the mounting direction, the degree of freedom in device design increases.

■Variable pump rotation speed in the range of 25 to 100%

The rotation speed can be varied and the chamber pressure can be adjusted.

■High durability and safety

It has passed various safety confirmation tests, including atmospheric entry tests and touchdown tests.

■Features

- Lineup includes exhaust speeds of 1000L/s to 4000L/s. ・Wide area high flow rate design for light processes

  • Product

    Controller-integrated turbo molecular pump UTM-MI series

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1 Models of Controller-integrated turbo molecular pump UTM-MI series

Image Part Number Price (excluding tax)
Controller-integrated turbo molecular pump UTM-MI series-Part Number-UTM-MI series

UTM-MI series

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ULVAC Sales Co., Ltd.

  • Japan

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