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  2. Actor Pump PST-400CX2/400AX2 (ULVAC Sales Co., Ltd.)
Actor Pump PST-400CX2/400AX2-PST-400CX2/400AX2
Actor Pump PST-400CX2/400AX2-ULVAC Sales Co., Ltd.

Actor Pump PST-400CX2/400AX2
ULVAC Sales Co., Ltd.

About This Product

■Summary

Sputter ion pump is one of the typical pumps used to generate ultra-high vacuum. Widely used in analytical instruments, accelerators, etc. ULVAC is a sputter ion pump that can generate extreme/ultra-high vacuum of 10^-10 Pa on its own, and has developed a new type of element (actor element) with enhanced exhaust characteristics in the extreme/ultra-high vacuum region, and a We developed the "Actor Pump" through optimization.

■Applications

・Accelerator ・Electron microscope ・Analytical equipment

■Features

- Compatible with extreme and ultra-high vacuum. Achieves ultimate pressure of 10-10Pa by attaching an ISO standard test dome. ・Rare gas enhanced exhaust type (AXⅡ type) achieves twice the exhaust performance compared to argon. (compared to our company) ・Achieves high pumping speed in the ultra-high vacuum region. ・Can be evacuated to ultra-high vacuum range in a short time. ・Excellent startup characteristics in extreme and ultra-high vacuum regions. (Discharge continues up to ultra-high vacuum region)

  • Product

    Actor Pump PST-400CX2/400AX2

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1 Models of Actor Pump PST-400CX2/400AX2

Image Part Number Price (excluding tax) Mass Standard bakeout temperature Connection flange model Pumping speed (regeneration pumping speed) External dimensions W×D×H Applied voltage Operating pressure Ultimate pressure Internal volume Number of pump elements Heater unit power requirements
Actor Pump PST-400CX2/400AX2-Part Number-PST-400CX2/400AX2

PST-400CX2/400AX2

Available upon quote

Approximately 124kg (with heater)

250℃

UFC203

N2: 0.36m3/s (CX2・AX2)
Ar：0.04m3/s (CX2)
0.19m3/s (AX2)

296×544×376mm

DC+7.5kV

<3.0×10^-3Pa (recommended value)
(Maximum operating pressure 1×10^-3Pa)
*When using GST-07L controller

10^-10Pa range

Approximately 0.014m3

CX2 type cell x 4 types / AX2 type cell x 4 types

Single phase 200V approximately 800W

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About Company Handling This Product

ULVAC Sales Co., Ltd.

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