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  2. Actor Pump PST-100CX/100AX (ULVAC Sales Co., Ltd.)
Actor Pump PST-100CX/100AX-PST-100CX/100AX
Actor Pump PST-100CX/100AX-ULVAC Sales Co., Ltd.

Actor Pump PST-100CX/100AX
ULVAC Sales Co., Ltd.

About This Product

■Summary

Sputter ion pump is one of the typical pumps used to generate ultra-high vacuum. Widely used in analytical instruments, accelerators, etc. ULVAC has developed the "Actor Pump" by developing a new element (actor element) with enhanced pumping characteristics in the extreme and ultra-high vacuum region and optimizing the magnetic field.

■Applications

・Accelerator ・Electron microscope ・Analytical equipment

■Features

- Compatible with extreme and ultra-high vacuum. Verified ultimate pressure of 10-9Pa by attaching an ISO standard test dome. ・Rare gas enhanced exhaust type (AX type) achieves twice the exhaust performance compared to argon. (compared to our company) ・Achieves high pumping speed in the ultra-high vacuum region. ・Can be evacuated to ultra-high vacuum range in a short time. ・Excellent starting characteristics in the ultra-high vacuum region. (Discharge continues up to ultra-high vacuum region)

  • Product

    Actor Pump PST-100CX/100AX

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1 Models of Actor Pump PST-100CX/100AX

Image Part Number Price (excluding tax) Mass Standard bakeout temperature Connection flange model Pumping speed (regeneration pumping speed) External dimensions W×D×H Applied voltage Operating pressure Ultimate pressure Internal volume Number of pump elements Heater unit power requirements
Actor Pump PST-100CX/100AX-Part Number-PST-100CX/100AX

PST-100CX/100AX

Available upon quote

Approximately 37Kg (with heater)

250℃

UFC152

N2:0.10m3/s (CX・AX)
0.08m3/s (at 1x10^-7Pa)

155×340×340mm

DC+7.5kV

<5.0×10^-3Pa (recommended value)
(Maximum operating pressure 1×10^-2Pa)
*When using GST-07L controller

10^-9Pa level

Approximately 3.3X10^-3m3

CX II type cell x 1 set / AX II type cell x 1 set

Single phase 200V approximately 320W

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About Company Handling This Product

ULVAC Sales Co., Ltd.

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