Mechanical booster pump PRC series Ver.A
ULVAC Sales Co., Ltd.
About This Product
■Summary
The PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturing processes that require particularly cleanliness. By using a canned motor, there is no oil leakage from the shaft seal. Atmospheric pressure drive type is also available as an option.
■Applications
・Vapor deposition, sputtering, ion plating
・Vacuum drying, freeze drying, vacuum deaeration
・Analytical equipment, leak test equipment
・Gas replacement, filling, vacuum insulation
・Heat treatment furnace, melting furnace
・Other various vacuum equipment
■Oil free
Since there is no lubricating oil inside the casing chamber, stable performance is achieved even against steam such as water vapor and solvents.
■Canned motor adopted
By using a canned motor, we were able to eliminate the air/vacuum mechanical seal. It can be used in a clean environment without worrying about oil leaks.
■Surface treatment with excellent corrosion resistance
The main parts are anodized with high surface hardness and excellent corrosion resistance, which prevents scratches and corrosion inside the pump. An option without surface treatment is also available.
■Atmospheric pressure drive type effective for shortening exhaust time (optional: inverter)
Since it can be started simultaneously with the roughing pump, pumping time can be reduced compared to the standard type.
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Product
Mechanical booster pump PRC series Ver.A
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Mechanical booster pump PRC series Ver.A
| Product Image | Part Number | Price (excluding tax) | Cooling method | Cooling water Cooling water amount L/min | Cooling water Cooling water temperature *4 ℃ | Cooling water inlet/outlet differential pressure MPa | Cooling water temporary side pressure MPa | Driveable pressure Pa | Exhaust diameter JIS-B-2290 | External dimensions (W×D×H) mm | Intake diameter JIS-B-2290 | Mass *5 kg | Maximum allowable pressure difference Pa | Maximum pumping speed m3/h (L/min) | Maximum suction pressure Pa | Motor output (number of poles) *2 kW | Oil used *3 | Option | Required oil amount L | Standard auxiliary pump *6 | Ultimate pressure *1 Pa |
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PRC-003A |
Available upon quote | Water cooling | 2 |
5~30 *4 If the cooling water temperature is low, please use it in an environment where there is no condensation. |
0.01 or more | 0.3 | ~1.0x10^5 (atmospheric pressure driven) | Equivalent to VF80 | 296×575×260 | Equivalent to VG80 |
51 *5 Value for standard pump. (Option: does not include inverter) |
50Hz: 4.0x10^3 60Hz: 3.3x10^3 |
50Hz: 280 (4,670) 60Hz: 330 (5,500) |
50Hz: 1.2x10^3 60Hz: 9.3x10^2 |
0.75 (2) *2 AC200V (50Hz/60Hz), AC220V (60Hz), 3 phase |
ULVOIL R-4 *3 Synthetic oil: R-7000 and fluorine oil: J25F can be selected as options. |
Atmospheric pressure drive (inverter), lubricating oil, separate exhaust port for lubrication chamber | 0.7 |
VD601 *6 The performance of the mechanical booster pump changes depending on the performance of the standard auxiliary pump. The above data is the value when combined with the standard auxiliary pump. |
4.0x10^-1 *1 Measured with a Pirani vacuum gauge (auxiliary pump and oil used are standard). With the McLide vacuum gauge, it is 4.0×10^-2Pa. |
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About Company Handling This Product
- Japan