Mechanical booster pump PRC series Ver.A-PRC-003A

Mechanical booster pump PRC series Ver.A
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■SummaryThe PRC series is a mechanical booster pump designed primarily for use in semiconductor and liquid crystal manufacturing processes that require particularly cleanliness. By using a canned motor, there is no oil leakage from the shaft seal. Atmospheric pressure drive type is also available as an option.

■Applications・Vapor deposition, sputtering, ion plating
・Vacuum drying, freeze drying, vacuum deaeration
・Analytical equipment, leak test equipment
・Gas replacement, filling, vacuum insulation
・Heat treatment furnace, melting furnace
・Other various vacuum equipment

■Oil freeSince there is no lubricating oil inside the casing chamber, stable performance is achieved even against steam such as water vapor and solvents.

■Canned motor adoptedBy using a canned motor, we were able to eliminate the air/vacuum mechanical seal. It can be used in a clean environment without worrying about oil leaks.

■Surface treatment with excellent corrosion resistanceThe main parts are anodized with high surface hardness and excellent corrosion resistance, which prevents scratches and corrosion inside the pump. An option without surface treatment is also available.

■Atmospheric pressure drive type effective for shortening exhaust time (optional: inverter)Since it can be started simultaneously with the roughing pump, pumping time can be reduced compared to the standard type.

Model
There are 1 models for this product.

Product
Mechanical booster pump PRC series Ver.A

Handling Company
ULVAC Sales Co., Ltd.

Categories

Pumps

Booster Pumps

Pumps

Mechanical Booster Pumps

100+ people viewing

Last viewed: 12 hours ago

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1 Models of Mechanical booster pump PRC series Ver.A

Image	Part Number	Price (excluding tax)	Driveable pressure Pa	Mass *5 kg	Standard auxiliary pump *6	Maximum allowable pressure difference Pa	Maximum pumping speed m3/h (L/min)	Maximum suction pressure Pa	Exhaust diameter JIS-B-2290	Required oil amount L	External dimensions (W×D×H) mm	Intake diameter JIS-B-2290	Ultimate pressure *1 Pa	Cooling water inlet/outlet differential pressure MPa	Cooling water Cooling water amount L/min	Cooling water Cooling water temperature *4 ℃	Cooling water temporary side pressure MPa	Cooling method	Oil used *3	Motor output (number of poles) *2 kW	Option
	PRC-003A	Available upon quote	~1.0x10^5 (atmospheric pressure driven)	51 *5 Value for standard pump. (Option: does not include inverter)	VD601 *6 The performance of the mechanical booster pump changes depending on the performance of the standard auxiliary pump. The above data is the value when combined with the standard auxiliary pump.	50Hz: 4.0x10^3 60Hz: 3.3x10^3	50Hz: 280 (4,670) 60Hz: 330 (5,500)	50Hz: 1.2x10^3 60Hz: 9.3x10^2	Equivalent to VF80	0.7	296×575×260	Equivalent to VG80	4.0x10^-1 *1 Measured with a Pirani vacuum gauge (auxiliary pump and oil used are standard). With the McLide vacuum gauge, it is 4.0×10^-2Pa.	0.01 or more	2	5~30 *4 If the cooling water temperature is low, please use it in an environment where there is no condensation.	0.3	Water cooling	ULVOIL R-4 *3 Synthetic oil: R-7000 and fluorine oil: J25F can be selected as options.	0.75 (2) *2 AC200V (50Hz/60Hz), AC220V (60Hz), 3 phase	Atmospheric pressure drive (inverter), lubricating oil, separate exhaust port for lubrication chamber

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

Japan

Mechanical booster pump PRC series Ver.A ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

About This Product

■Summary

■Applications

■Oil free

■Canned motor adopted

■Surface treatment with excellent corrosion resistance

■Atmospheric pressure drive type effective for shortening exhaust time (optional: inverter)

1 Models of Mechanical booster pump PRC series Ver.A

PRC-003A

Customers who viewed this product also viewed

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

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Mechanical booster pump PRC series Ver.A
ULVAC Sales Co., Ltd.