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  4. Dry vacuum pump GR series (ULVAC Sales Co., Ltd.)
Dry vacuum pump GR series-GR60A 50Hz specifications
Dry vacuum pump GR series-ULVAC Sales Co., Ltd.

Dry vacuum pump GR series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The dry vacuum pump GR series is a simple pump designed for general industry, based on the proven and reliable LR/HR series.

■Applications

・Vacuum exhaust of clean gases such as air and inert gases ・Exhaust the loading and unloading chambers of various film forming equipment ・General industrial applications such as vacuum drying, vacuum gas replacement, and vacuum degassing ・Vacuum gas replacement such as vacuum insulation and gas filling

■Features

・Can be used for high-load applications such as repeated evacuation from atmosphere to vacuum and continuous operation in high pressure areas. ・Ideal for exhausting load lock chambers (loading and unloading chambers) that require high throughput ・Compatible with general-purpose induction motors ・Special motors such as explosion-proof motors can be installed (optional) ・Uses multi-voltage compatible motor *Please select from 200V class motor or multi-voltage motor when ordering (GR180A is a common motor)

  • Product

    Dry vacuum pump GR series

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1 Models of Dry vacuum pump GR series

Image Part Number Price (excluding tax) Shaft Mass Maximum pumping speed Maximum exhaust pressure (suction pressure) Maximum exhaust port pressure (discharge pressure) Exhaust port Intake port (CE specification) Ultimate pressure Cooling water temperature Cooling water flow rate Cooling water inlet/outlet differential pressure Cooling water primary supply pressure Secondary side adjustment pressure*3 Primary side supply pressure pressure DRP surface treatment
Dry vacuum pump GR series-Part Number-GR60A 50Hz specifications

GR60A 50Hz specifications

Available upon quote

5SLM *4
*4 The flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.

128kg

M3/h:62
L/min:1,030
cfm:36.4

Atmospheric pressure

1Pa~Atmospheric pressure
7.5x10-3Pa~Atmospheric pressure
1.0x10-2mbar~atmospheric pressure

NW40

VG50 or ISO63F

5.0Pa *1
3.7x10-2Torr *1
5.0x10-2mbar *1
*1 The ultimate pressure is the value when nitrogen gas (shaft seal gas) is 5.0SLM.

10~30℃ *2
50~86℃
*2 No condensation.

>5.0L/m

>0.1MPa
>14.5psi

0.1~0.3MPa
14.5~43.5psi

0.05~0.1MPa (during operation)
7.3 to 14.5psi
*3 This is the pressure gauge value adjusted by the regulator.

0.1~0.5MPa
14.5~72.5psi

○

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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