Dry vacuum pump GR series-GR60A 50Hz specifications

Dry vacuum pump GR series
ULVAC Sales Co., Ltd.

About This Product

■SummaryThe dry vacuum pump GR series is a simple pump designed for general industry, based on the proven and reliable LR/HR series.

■Applications・Vacuum exhaust of clean gases such as air and inert gases
・Exhaust the loading and unloading chambers of various film forming equipment
・General industrial applications such as vacuum drying, vacuum gas replacement, and vacuum degassing
・Vacuum gas replacement such as vacuum insulation and gas filling

■Features・Can be used for high-load applications such as repeated evacuation from atmosphere to vacuum and continuous operation in high pressure areas.
・Ideal for exhausting load lock chambers (loading and unloading chambers) that require high throughput
・Compatible with general-purpose induction motors
・Special motors such as explosion-proof motors can be installed (optional)
・Uses multi-voltage compatible motor
*Please select from 200V class motor or multi-voltage motor when ordering (GR180A is a common motor)

Model
There is 1 model available for this product.

Product
Dry vacuum pump GR series

Handling Company
ULVAC Sales Co., Ltd.

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Pumps

Vacuum Pumps

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Last viewed: 7 hours ago

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1 Models of Dry vacuum pump GR series

Image	Part Number	Price (excluding tax)	Shaft	Mass	Maximum pumping speed	Maximum exhaust pressure (suction pressure)	Maximum exhaust port pressure (discharge pressure)	Exhaust port	Intake port (CE specification)	Ultimate pressure	Cooling water temperature	Cooling water flow rate	Cooling water inlet/outlet differential pressure	Cooling water primary supply pressure	Secondary side adjustment pressure*3	Primary side supply pressure pressure	DRP surface treatment
	GR60A 50Hz specifications	Available upon quote	5SLM 4 4 The flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.	128kg	M3/h:62 L/min:1,030 cfm:36.4	Atmospheric pressure	1Pa~Atmospheric pressure 7.5x10-3Pa~Atmospheric pressure 1.0x10-2mbar~atmospheric pressure	NW40	VG50 or ISO63F	5.0Pa 1 3.7x10-2Torr 1 5.0x10-2mbar 1 1 The ultimate pressure is the value when nitrogen gas (shaft seal gas) is 5.0SLM.	10~30℃ 2 50~86℃ 2 No condensation.	>5.0L/m	>0.1MPa >14.5psi	0.1~0.3MPa 14.5~43.5psi	0.05~0.1MPa (during operation) 7.3 to 14.5psi *3 This is the pressure gauge value adjusted by the regulator.	0.1~0.5MPa 14.5~72.5psi	○

Image

Part Number

Price (excluding tax)

Shaft

Mass

Maximum pumping speed

Maximum exhaust pressure (suction pressure)

Maximum exhaust port pressure (discharge pressure)

Exhaust port

Intake port (CE specification)

Ultimate pressure

Cooling water temperature

Cooling water flow rate

Cooling water inlet/outlet differential pressure

Cooling water primary supply pressure

Secondary side adjustment pressure*3

Primary side supply pressure pressure

DRP surface treatment

GR60A 50Hz specifications

Available upon quote

5SLM *4
*4 The flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.

128kg

M3/h:62
L/min:1,030
cfm:36.4

Atmospheric pressure

1Pa~Atmospheric pressure
7.5x10-3Pa~Atmospheric pressure
1.0x10-2mbar~atmospheric pressure

NW40

VG50 or ISO63F

5.0Pa *1
3.7x10-2Torr *1
5.0x10-2mbar *1
*1 The ultimate pressure is the value when nitrogen gas (shaft seal gas) is 5.0SLM.

10~30℃ *2
50~86℃
*2 No condensation.

>5.0L/m

>0.1MPa
>14.5psi

0.1~0.3MPa
14.5~43.5psi

0.05~0.1MPa (during operation)
7.3 to 14.5psi
*3 This is the pressure gauge value adjusted by the regulator.

0.1~0.5MPa
14.5~72.5psi

○

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Japan

Dry vacuum pump GR series ULVAC Sales Co., Ltd.

About This Product

■Summary

■Applications

■Features

1 Models of Dry vacuum pump GR series

GR60A 50Hz specifications

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Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

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Dry vacuum pump GR series
ULVAC Sales Co., Ltd.