UR series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■SummaryThe dry vacuum pump LR/HR/UR series achieves high durability in hard processes such as CVD and etching by effectively utilizing compression heat using unique high-temperature soaking technology. In the light process, power consumption can be cut by up to 80% in combination with ECO-SHOCK. In addition, we have improved maintainability and reduced noise, and all models are now CE compliant (optional).

■Applications・Active gas (CVD, dry etching, etc.)
・Inert gas exhaust (sputtering, vapor deposition, heat treatment, etc.)
・Shortening the exhaust time of the loading and unloading chamber (LR series)
・Exhaust in processes that generate powder (Si single crystal pulling, etc.)
・As an auxiliary exhaust pump (auxiliary exhaust for turbo molecular pumps and mechanical booster pumps)

■Features・Measures against instantaneous power outages within 1,000msec
・CE compatible (optional)

■LR series: Uniform heat in low temperature rangeIn addition to inert gas exhaust, it is especially suitable for exhausting preparation and unloading rooms where shortening exhaust time is important to increase throughput.

■HR series/UR series: Uniform heat in high temperature rangeSublimation exhaust substances generated during CVD, etching, etc. can be discharged in gaseous form.

Model
There is 1 model available for this product.

Product
Dry vacuum pump LR/HR/UR series

Handling Company
ULVAC Sales Co., Ltd.

Categories

Pumps

Vacuum Pumps

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1 Models of Dry vacuum pump LR/HR/UR series

Image	Part Number	Price (excluding tax)	Current value (A)	Power 3-phase VAC (Hz)	Mass (kg)	Maximum pumping speed (m3/h)	Maximum pumping speed (L/min)	Maximum exhaust pressure (suction pressure)	Maximum exhaust port pressure (discharge pressure)	Exhaust port	Intake port (CE specification)	Ultimate pressure (Pa)	Cooling water flow rate (L/min)	Cooling water inlet/outlet differential pressure (MPa)	Cooling water primary pressure (MPa)	Pump used DRP	Purge gas (MPa)	Dry pump surface treatment	N2 purge shaft (SLM)	N2 purge gas valve (SLM)
	LR/HR60	Available upon quote	Steady state: 6.9/7.1 Maximum value: 7.0/7.3	200 (50/60), 220 (60)	180	50Hz:62 60Hz:80	50Hz:1,030 60Hz:1,333	Atmospheric pressure	1Pa~Atmospheric pressure	KF40	VG50 (KF40)	5	>5.0	>0.1	0.1 to 0.3	LR/HR60	Primary pressure: 0.1~0.5 Secondary pressure: 0.05~0.1	○	5	0~45

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

Japan

Dry vacuum pump LR/HR/UR series ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

About This Product

■Summary

■Applications

■Features

■LR series: Uniform heat in low temperature range

■HR series/UR series: Uniform heat in high temperature range

1 Models of Dry vacuum pump LR/HR/UR series

LR/HR60

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Dry vacuum pump LR/HR/UR series
ULVAC Sales Co., Ltd.