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  4. Dry vacuum pump LS series (ULVAC Sales Co., Ltd.)
Dry vacuum pump LS series-LS***A-C
Dry vacuum pump LS series-ULVAC Sales Co., Ltd.

Dry vacuum pump LS series
ULVAC Sales Co., Ltd.

About This Product

■Summary

A dry vacuum pump that achieves both high-speed pumping and low power consumption. With a lineup of 4 models, you can select the pump with the optimal exhaust capacity to match the size of the equipment and usage conditions.

■High speed exhaust

High pumping speed near atmospheric pressure allows shortening of pumping time

■Low power consumption

・Low power consumption achieved by ECO-SHOCK technology (C specification) ・Power consumption at ultimate pressure is 0.6kW or less (LS120A-C)

■Low noise

・Equipped with a dedicated silencer as standard ・Noise value at ultimate pressure is 61dB (A) or less

■Reduction in running costs

No need for shaft seal gas, which was previously required. *L specification allows purge gas to flow.

■Lineup of 4 models in total

・Pumping speed 120-1,200m3/h class *Combination with mechanical booster pump ・It is possible to select the model with the optimal exhaust capacity depending on the application.

  • Product

    Dry vacuum pump LS series

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1 Models of Dry vacuum pump LS series

Image Part Number Price (excluding tax) Purpose Features Model name
Dry vacuum pump LS series-Part Number-LS***A-C

LS***A-C

Available upon quote

・For clean exhaust such as air exhaust and N2 exhaust
・Sputtering/vapor deposition/bonding/load lock chamber/TMP assistance, etc.

Low power consumption type with built-in ECO-SHOCK

C specification clean process

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About Company Handling This Product

ULVAC Sales Co., Ltd.

  • Japan

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