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  4. Drying oven AMF-1000, ACF-500, ASF-500 (ULVAC Sales Co., Ltd.)
Drying oven AMF-1000, ACF-500, ASF-500-AMF-1000
Drying oven AMF-1000, ACF-500, ASF-500-ULVAC Sales Co., Ltd.

Drying oven AMF-1000, ACF-500, ASF-500
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

ULVAC's vacuum drying oven is a device that is suitable for degassing and pretreatment applications in a clean environment in the pressure range from HV to UHV, and for reprocessing applications that clean substances attached to the surface of parts through vacuum annealing. .

■Applications

・For vacuum parts reprocessing ・For color filter pretreatment and small panel annealing ・SEM parts UHV degassing ・For degassing after cleaning semiconductor parts

■Features

・Designed with a side door system and an emphasis on ease of maintenance ・Can heat-treat 10 panels of 1m x 1m size at the same time ・Equipped with a trap to remove gas released during regeneration ・Temperature distribution during heating and cooling can be controlled uniformly over a large area ・We provide an annealing furnace with an ultimate pressure of 10-6Pa as standard equipment and a UHV specification of 10-7Pa.

  • Product

    Drying oven AMF-1000, ACF-500, ASF-500

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1 Models of Drying oven AMF-1000, ACF-500, ASF-500

Image Part Number Price (excluding tax) Temperature distribution Exhaust system Substrate heating temperature Heating range Heating method Ultimate pressure
Drying oven AMF-1000, ACF-500, ASF-500-Part Number-AMF-1000

AMF-1000

Available upon quote

450℃±10℃

Cryopump, TMP+RP selectable

MAX450℃

1,000mm×1,000mm×40H×10 sheets

Internal heating method

7×10-6Pa

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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