Drying oven AMF-1000, ACF-500, ASF-500
ULVAC Sales Co., Ltd.
About This Product
■Summary
ULVAC's vacuum drying oven is a device that is suitable for degassing and pretreatment applications in a clean environment in the pressure range from HV to UHV, and for reprocessing applications that clean substances attached to the surface of parts through vacuum annealing. .
■Applications
・For vacuum parts reprocessing
・For color filter pretreatment and small panel annealing
・SEM parts UHV degassing
・For degassing after cleaning semiconductor parts
■Features
・Designed with a side door system and an emphasis on ease of maintenance
・Can heat-treat 10 panels of 1m x 1m size at the same time
・Equipped with a trap to remove gas released during regeneration
・Temperature distribution during heating and cooling can be controlled uniformly over a large area
・We provide an annealing furnace with an ultimate pressure of 10-6Pa as standard equipment and a UHV specification of 10-7Pa.
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Product
Drying oven AMF-1000, ACF-500, ASF-500
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Drying oven AMF-1000, ACF-500, ASF-500
| Product Image | Part Number | Price (excluding tax) | Exhaust system | Heating method | Heating range | Substrate heating temperature | Temperature distribution | Ultimate pressure |
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AMF-1000 |
Available upon quote | Cryopump, TMP+RP selectable | Internal heating method | 1,000mm×1,000mm×40H×10 sheets | MAX450℃ | 450℃±10℃ | 7×10-6Pa |
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About Company Handling This Product
- Japan