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Tabletop type/small vacuum evaporation equipment VPC-260F-VPC-260F
Tabletop type/small vacuum evaporation equipment VPC-260F-ULVAC Sales Co., Ltd.

Tabletop type/small vacuum evaporation equipment VPC-260F
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

Adopts air-cooled diffusion pump (200L/sec) + oil rotary pump. Low-cost, compact vacuum evaporation equipment (resistance heating type). Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement ports are compactly stored in the pipe frame.

■Features

-Equipped with casters, this vapor deposition equipment is easy to move. -Glass bell jar makes it easy to see the inside and is easy to operate. ・It is possible to open the vacuum chamber without stopping the main pump. ・Simultaneous evaporation and multilayer evaporation are possible by adding evaporation power sources and electrodes. ・RoHS compliant

  • Product

    Tabletop type/small vacuum evaporation equipment VPC-260F

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1 Models of Tabletop type/small vacuum evaporation equipment VPC-260F

Image Part Number Price (excluding tax) Ionization vacuum gauge Power supply mass Power supply maximum dimensions Auxiliary pump Auxiliary valve Evaporation power source/quantity Evaporation electrode configuration Automatic leak valve Vacuum chamber Liquid nitrogen trap Body mass Maximum body dimensions Operation Exhaust time Required amount of electricity Power supply Required amount of electricity Main unit Recommended board size/maximum size*1 Power supply 1φ200V Interlocking body 1φ100V Ultimate pressure Main pump Main valve Feed through color Pirani vacuum gauge Oil mist trap Earth terminal
Tabletop type/small vacuum evaporation equipment VPC-260F-Part Number-VPC-260F

VPC-260F

Available upon quote

Option

40kg

480mm (W) ×435.3mm (D) ×149mm (H)

Oil rotary vacuum pump 100L/min

Three way valve

SEREM PSE-150C・1 set
0~10V 150A (Max)

1 point type

Option

Glass bell jar (inner diameter φ300mm x height 300mm)

Yes

75kg

530mm (W) ×550mm (D) ×1,135mm (H)

Manual

4.0×10-3Pa/20min
1.3×10-3Pa/20min (when using liquid nitrogen)

200V single phase 50/60Hz 1.5kVA

100V single phase 50/60Hz 1.35kVA

□50mm ・ □140mm (Max)
*1: The maximum substrate size is the value without considering film thickness distribution.

Vinyl captire cable (with R2.0-5 crimp terminal) 2m

Vinyl captire cable (with plug) 2m

1.3×10-3Pa
6.6×10-4Pa (when using liquid nitrogen)

Oil diffusion pump (air cooling) 200L/sec

Clapper valve

8 ports (8 on side)

Option

Option

Class D (ground resistance value 100Ω or less)

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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