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Small vacuum evaporation equipment VFR-200M/ERH-VFR-200M/ERH
Small vacuum evaporation equipment VFR-200M/ERH-ULVAC Sales Co., Ltd.

Small vacuum evaporation equipment VFR-200M/ERH
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

Adopts air-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement ports are compactly stored in the pipe frame. Ideal for experiments such as basic research and development with small substrate size. Detailed operating instructions for the DEPOX series are available on Youtube. Please help.

■Features

-Equipped with casters, this vapor deposition equipment is easy to move. -Glass bell jar makes it easy to see the inside and is easy to operate. ・It is possible to open the vacuum chamber without stopping the main pump. ・Simultaneous evaporation and multilayer evaporation are possible by adding evaporation power sources and electrodes. ・RoHS compliant

  • Product

    Small vacuum evaporation equipment VFR-200M/ERH

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1 Models of Small vacuum evaporation equipment VFR-200M/ERH

Image Part Number Price (excluding tax) Ionization vacuum gauge Power supply mass Power supply maximum dimensions Auxiliary pump Auxiliary valve Evaporation power source/quantity Evaporation electrode configuration Automatic leak valve Vacuum chamber Liquid nitrogen trap Body mass Maximum body dimensions Operation Exhaust time Required amount of electricity Power supply Required amount of electricity Main unit Recommended board size/maximum size*1 Power supply 1φ200V Interlocking body 1φ100V Ultimate pressure Main pump Main valve Feed through color Pirani vacuum gauge Oil mist trap Earth terminal
Small vacuum evaporation equipment VFR-200M/ERH-Part Number-VFR-200M/ERH

VFR-200M/ERH

Available upon quote

GI-M2

40kg

480mm (W) ×435.3mm (D) ×149mm (H)

Oil rotary vacuum pump (100L/min)

Three way valve

SEREM PSE-150C 1 set
0~10V 150A (Max)

1 point type

Option

Glass bell jar (inner diameter φ300mm x height 300mm)

Yes

145kg

730mm (W) ×603mm (D) ×1,161mm (H)

Manual

4.0×10-3Pa/15min
3.0×10-3Pa/15min (when using liquid nitrogen)

200V single phase 50/60Hz 1.5kVA

100V single phase 50/60Hz 1.4kVA

□50mm ・ □140mm (Max)
*1: The maximum substrate size is the value without considering film thickness distribution.

Vinyl captire cable (with R2.0-5 crimp terminal) 2m

Vinyl captire cable (with R3.5-4 crimp terminal) 4m

8.0×10-4Pa
6.0×10-4Pa (when using liquid nitrogen)

Oil diffusion pump (air cooling) (200L/sec)

Butterfly valve

12 ports (8 on the side/4 on the bottom)

GP-1G

Inline trap OMI-100

Class D (ground resistance value 100Ω or less)

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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