Small vacuum evaporation equipment VFR-200M/ERH
ULVAC Sales Co., Ltd.
About This Product
■Summary
Adopts air-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such as the main pump, auxiliary pump, valve piping, electrical system, and pressure measurement ports are compactly stored in the pipe frame. Ideal for experiments such as basic research and development with small substrate size. Detailed operating instructions for the DEPOX series are available on Youtube. Please help.
■Features
-Equipped with casters, this vapor deposition equipment is easy to move.
-Glass bell jar makes it easy to see the inside and is easy to operate.
・It is possible to open the vacuum chamber without stopping the main pump.
・Simultaneous evaporation and multilayer evaporation are possible by adding evaporation power sources and electrodes.
・RoHS compliant
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Product
Small vacuum evaporation equipment VFR-200M/ERH
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Small vacuum evaporation equipment VFR-200M/ERH
| Product Image | Part Number | Price (excluding tax) | Automatic leak valve | Auxiliary pump | Auxiliary valve | Body mass | Earth terminal | Evaporation electrode configuration | Evaporation power source/quantity | Exhaust time | Feed through color | Interlocking body 1φ100V | Ionization vacuum gauge | Liquid nitrogen trap | Main pump | Main valve | Maximum body dimensions | Oil mist trap | Operation | Pirani vacuum gauge | Power supply 1φ200V | Power supply mass | Power supply maximum dimensions | Recommended board size/maximum size*1 | Required amount of electricity Main unit | Required amount of electricity Power supply | Ultimate pressure | Vacuum chamber |
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VFR-200M/ERH |
Available upon quote | Option | Oil rotary vacuum pump (100L/min) | Three way valve | 145kg | Class D (ground resistance value 100Ω or less) | 1 point type |
SEREM PSE-150C 1 set 0~10V 150A (Max) |
4.0×10-3Pa/15min 3.0×10-3Pa/15min (when using liquid nitrogen) |
12 ports (8 on the side/4 on the bottom) | Vinyl captire cable (with R3.5-4 crimp terminal) 4m | GI-M2 | Yes | Oil diffusion pump (air cooling) (200L/sec) | Butterfly valve | 730mm (W) ×603mm (D) ×1,161mm (H) | Inline trap OMI-100 | Manual | GP-1G | Vinyl captire cable (with R2.0-5 crimp terminal) 2m | 40kg | 480mm (W) ×435.3mm (D) ×149mm (H) |
□50mm ・ □140mm (Max) *1: The maximum substrate size is the value without considering film thickness distribution. |
100V single phase 50/60Hz 1.4kVA | 200V single phase 50/60Hz 1.5kVA |
8.0×10-4Pa 6.0×10-4Pa (when using liquid nitrogen) |
Glass bell jar (inner diameter φ300mm x height 300mm) |
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About Company Handling This Product
- Japan