Small vacuum evaporation equipment VWR-400M/ERH
ULVAC Sales Co., Ltd.
About This Product
■Summary
Adopts water-cooled oil diffusion pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such as the main pump, auxiliary pump, Pirani vacuum gauge, ionization vacuum gauge, valve piping, and electrical system are compactly stored within the mount.
This DEPOX series has four types with different exhaust system configurations. Easy to handle and ideal for experiments such as basic research and development. Detailed operating instructions for the DEPOX series are available on Youtube. Please help.
■Features
-Equipped with casters, this vapor deposition equipment is easy to move.
- Comes with an adjuster to ensure installation safety.
-Glass bell jar makes it easy to see the inside and is easy to operate.
・It is possible to open the vacuum chamber without stopping the main pump.
- By adding an evaporation power source and electrode, simultaneous evaporation and multilayer deposition (up to 4 layers) are possible.
・RoHS compliant
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Product
Small vacuum evaporation equipment VWR-400M/ERH
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Small vacuum evaporation equipment VWR-400M/ERH
| Product Image | Part Number | Price (excluding tax) | Automatic leak valve | Auxiliary pump | Auxiliary valve | Body mass | Earth terminal | Evaporation electrode configuration | Evaporation power source/quantity | Exhaust time | Feed through color | Interaction (socket) | Interlocking body 1φ100V | Ionization vacuum gauge | Liquid nitrogen trap | Main pump | Main valve | Maximum body dimensions | Oil mist trap | Operation | Pirani vacuum gauge | Power supply 1φ200V | Power supply mass | Power supply maximum dimensions | Recommended board size/maximum size*1 | Recommended hose * | Required amount of electricity Main unit | Required amount of electricity Power supply | Required amount of water | Ultimate pressure | Vacuum chamber |
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VWR-400M/ERH |
Available upon quote | Option | Oil rotary vacuum pump (200L/min) | Three way valve | 148kg | Class D (ground resistance value 100Ω or less) | 1 point type |
SEREM PSE-150C 1 set 0~10V 150A (Max) |
4.0×10-3Pa/10min 3.0×10-3Pa/10min (when using liquid nitrogen) |
12 ports (8 on the side/4 on the bottom) | Rp1/4 (with easy-touch fitting) | Vinyl captire cable (with R3.5-4 crimp terminal) 4m | GI-M2 | Yes | Oil diffusion pump (water cooling) (400L/sec) | Butterfly valve | 730mm (W) ×709mm (D) ×1,161mm (H) | Inline trap OMI-200 | Manual | GP-1G | Vinyl captire cable (with R2.0-5 crimp terminal) 2m | 40kg | 480mm (W) ×435.3mm (D) ×149mm (H) |
□50mm ・ □140mm (Max) *1: The maximum substrate size is the value without considering film thickness distribution. |
Tetron braided hose (inner diameter 9mm - outer diameter 15mm) *Please prepare cooling water piping by yourself. |
100V single phase 50/60Hz 1.6kVA | 200V single phase 50/60Hz 1.5kVA |
2.0 L/min (Water temperature 20~25℃, water pressure 200kPa (gauge pressure)) |
4.0×10-4Pa 3.0×10-4Pa (when using liquid nitrogen) |
Glass bell jar (inner diameter φ300mm x height 300mm) |
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About Company Handling This Product
- Japan