Small vacuum evaporation equipment VTR-060M/ERH
ULVAC Sales Co., Ltd.
About This Product
■Summary
This is a small, resistance-heating, low-cost vacuum evaporation device that compactly houses a turbomolecular pump and auxiliary pump inside the stand. Clean exhaust makes it ideal for experiments such as basic research and development.
■Features
- Compact tabletop size allows space-saving installation.
- Equipped with a turbo molecular pump.
・High vacuum evacuation is possible just by operating a switch.
・Highly expandable, multilayer film deposition and substrate rotation are possible.
・Ideal for vapor deposition of low melting point metals.
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Product
Small vacuum evaporation equipment VTR-060M/ERH
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Small vacuum evaporation equipment VTR-060M/ERH
| Product Image | Part Number | Price (excluding tax) | Arrangement (main body) | Automatic leak valve | Auxiliary pump | Auxiliary valve | Competition (power supply) | Evaporation electrode | Evaporation electrode configuration | Exhaust time | Feed through color | Film thickness meter | Main pump | Main valve | Mass (kg) | Mass (power) (kg) | Maximum dimension (mm) | Maximum dimensions (power) (mm) | Oil mist trap | Operation | Recommended board size/maximum size *2 | Required amount of electricity (main unit) | Required amount of electricity (power supply) | Substrate/electrode distance | Ultimate pressure | Vacuum chamber |
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VTR-060M/ERH |
Available upon quote | Single phase (100V): Vinyl captire cable (with plug) 4m | Option | Oil rotary vacuum pump 20L/min | Options (three-way valve) | Single phase (100V): Vinyl captire cable (with plug) 4m | SEREM PSE-150C・1 set 0-10V 80A (Max) | 1 point type | 4.0×10-3Pa/20min | 7 ports (bottom) | Options (CRTM-6000G) | Turbo molecular pump 60L/sec | Options (butterfly valve) | 50 | Twenty four | 428 (W) × 438 (L) × 713 (H) | 480 (W) × 435.3 (D) × 149 (H) | OMT-050A | Manual | □50mm ・ □120mm (Max) | Single phase (100V) (50/60Hz): 0.6kVA | Single phase (100V) (50/60Hz): 0.8kVA | Max 200mm | 10-4 | Cylindrical glass chamber (φ236mm x H250mm) |
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About Company Handling This Product
- Japan