Small vacuum evaporation equipment VTS-350M/ERH
ULVAC Sales Co., Ltd.
About This Product
■Summary
Adopts turbo molecular pump + oil rotary vacuum pump. A small resistance heating type vacuum evaporation device. Necessary equipment such as the main pump, auxiliary pump, Pirani vacuum gauge, ionization vacuum gauge, valve piping, and electrical system are stored compactly within the mount.
This DEPOX series has four types with different exhaust system configurations. Easy to handle and ideal for experiments such as basic research and development. Detailed operating instructions for the DEPOX series are available on Youtube. Please help.
■Features
-Equipped with casters, this vapor deposition equipment is easy to move.
- Comes with an adjuster to ensure installation safety.
-Glass bell jar makes it easy to see the inside and is easy to operate.
・It is possible to open the vacuum chamber without stopping the main pump.
- By adding an evaporation power source and electrode, simultaneous evaporation and multilayer deposition (up to 4 layers) are possible.
・RoHS compliant
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Product
Small vacuum evaporation equipment VTS-350M/ERH
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Small vacuum evaporation equipment VTS-350M/ERH
| Product Image | Part Number | Price (excluding tax) | Automatic leak valve | Auxiliary pump | Auxiliary valve | Body mass | Earth terminal | Evaporation electrode configuration | Evaporation power source/quantity | Exhaust time | Feed through color | Interlocking body 1φ100V | Ionization vacuum gauge | Liquid nitrogen trap | Main pump | Main valve | Maximum body dimensions | Operation | Pirani vacuum gauge | Power supply 1φ200V | Power supply mass | Power supply maximum dimensions | Recommended board size/maximum size *2 | Required amount of electricity Main unit | Required amount of electricity Power supply | Ultimate pressure | Vacuum chamber |
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VTS-350M/ERH |
Available upon quote | Yes | Scroll pump (250L/min) | Three way valve | 160kg | Class D (ground resistance value 100Ω or less) | 1 point type |
SEREM PSE-150C 1 set 0~10V 150A (Max) |
4.0×10-3Pa/10min 3.0×10-3Pa/10min (when using liquid nitrogen) *1 *1: Liquid nitrogen trap is optional. |
12 ports (8 on the side/4 on the bottom) | Vinyl captire cable (with R3.5-4 crimp terminal) 4m | GI-M2 | Option | Turbo molecular pump (345L/sec) | Butterfly valve | 730mm (W) ×584mm (D) ×1,161mm (H) | Manual | GP-1G | Vinyl captire cable (with R2.0-5 crimp terminal) 2m | 40kg | 480mm (W) ×435.3mm (D) ×149mm (H) |
□50mm ・ □140mm (Max) *2: The maximum substrate size is the value without considering film thickness distribution. |
100V single phase 50/60Hz 0.9kVA | 200V single phase 50/60Hz 1.5kVA |
4.0×10-4Pa 2.0×10-4Pa (when using liquid nitrogen) *1 *1: Liquid nitrogen trap is optional. |
Glass bell jar (inner diameter φ300mm x height 300mm) |
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About Company Handling This Product
- Japan