High-speed vacuum evaporation equipment VPC-1100
ULVAC Sales Co., Ltd.
About This Product
■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump
Necessary equipment such as oil diffusion pumps, oil rotary vacuum pumps, Pirani vacuum gauges, valve piping, electrical systems, pressure measurement ports, etc. are compactly stored within the mount. Ideal for experiments such as basic research and development with large substrate sizes.
■Features
-Equipped with casters, this vapor deposition equipment is easy to move.
- Comes with an adjuster to ensure installation safety.
-Glass bell jar makes it easy to see the inside and is easy to operate.
・It is possible to open the vacuum chamber without stopping the main pump.
・Simultaneous evaporation and multilayer evaporation are possible by adding evaporation power sources and electrodes.
・By changing to EB specifications, it is possible to form films of high melting point materials.
・RoHS compliant
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Product
High-speed vacuum evaporation equipment VPC-1100
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of High-speed vacuum evaporation equipment VPC-1100
| Product Image | Part Number | Price (excluding tax) | Automatic leak valve | Auxiliary pump | Auxiliary valve | Body mass | Earth terminal | Evaporation electrode configuration | Evaporation power source/quantity | Exhaust time | Feed through color | Interaction (socket) | Ionization vacuum gauge | Liquid nitrogen trap | Main body | Main body 1φ100V | Main body 3φ200V | Main pump *2 | Main valve | Maximum body dimensions | Oil mist trap | Operation | Pirani vacuum gauge | Power supply mass | Power supply maximum dimensions | Recommended board size/maximum size*1 | Recommended hose* | Required amount of water | Ultimate pressure | Vacuum chamber |
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VPC-1100 |
Available upon quote | Option | Oil rotary vacuum pump 200L/min, 2 units | Three way valve | 313kg | Class D (ground resistance value 100Ω or less) | 3 point type |
SEREM PSE-150C・1 set 0~10V 150A (Max) |
4.0×10-3Pa/10min 10-4Pa/10min (when using liquid nitrogen) |
20 ports (14 on the side/6 on the bottom) | Rp1/4 (with easy-touch fitting) | Option | Yes |
200V 3 phase 50/60Hz 5.0kVA 100V single phase 50/60Hz 1.0kVA |
Vinyl captire cable (with plug) 4m | Vinyl captire cable (with R3.5-4 crimp terminal) 4m |
Oil diffusion pump (water cooling) 1,100L/sec *2: We will arrange it to turbo molecular pump (TMP) specifications. |
Butterfly valve | 1,235mm (W) ×836mm (D) ×2,155mm (H) | Option | Manual | GP-1G | Device storage | Device storage |
□50mm ・ □220mm (Max) *1: The maximum substrate size is the value without considering film thickness distribution. |
Tetron braided hose (inner diameter 9mm x outer diameter 15mm) *Please prepare cooling water piping by yourself. |
1.5 L/min (Water temperature: 20~25℃, Water pressure: 200kPa (gauge pressure)) |
4.0×10-4Pa 1.3×10-4Pa (when using liquid nitrogen) |
Glass bell jar (inner diameter φ390mm x height 350mm) |
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About Company Handling This Product
- Japan