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High-speed vacuum evaporation equipment VPC-1100-VPC-1100
High-speed vacuum evaporation equipment VPC-1100-ULVAC Sales Co., Ltd.

High-speed vacuum evaporation equipment VPC-1100
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Water-cooled oil diffusion pump (1,100L/sec) + oil rotary vacuum pump

Necessary equipment such as oil diffusion pumps, oil rotary vacuum pumps, Pirani vacuum gauges, valve piping, electrical systems, pressure measurement ports, etc. are compactly stored within the mount. Ideal for experiments such as basic research and development with large substrate sizes.

■Features

-Equipped with casters, this vapor deposition equipment is easy to move. - Comes with an adjuster to ensure installation safety. -Glass bell jar makes it easy to see the inside and is easy to operate. ・It is possible to open the vacuum chamber without stopping the main pump. ・Simultaneous evaporation and multilayer evaporation are possible by adding evaporation power sources and electrodes. ・By changing to EB specifications, it is possible to form films of high melting point materials. ・RoHS compliant

  • Product

    High-speed vacuum evaporation equipment VPC-1100

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1 Models of High-speed vacuum evaporation equipment VPC-1100

Image Part Number Price (excluding tax) Ionization vacuum gauge Power supply mass Power supply maximum dimensions Auxiliary pump Auxiliary valve Evaporation power source/quantity Evaporation electrode configuration Automatic leak valve Vacuum chamber Liquid nitrogen trap Body mass Maximum body dimensions Main body 3φ200V Main body 1φ100V Main body Operation Recommended hose* Exhaust time Required amount of water Recommended board size/maximum size*1 Interaction (socket) Ultimate pressure Main pump *2 Main valve Feed through color Pirani vacuum gauge Oil mist trap Earth terminal
High-speed vacuum evaporation equipment VPC-1100-Part Number-VPC-1100

VPC-1100

Available upon quote

Option

Device storage

Device storage

Oil rotary vacuum pump 200L/min, 2 units

Three way valve

SEREM PSE-150C・1 set
0~10V 150A (Max)

3 point type

Option

Glass bell jar (inner diameter φ390mm x height 350mm)

Yes

313kg

1,235mm (W) ×836mm (D) ×2,155mm (H)

Vinyl captire cable (with R3.5-4 crimp terminal) 4m

Vinyl captire cable (with plug) 4m

200V 3 phase 50/60Hz 5.0kVA
100V single phase 50/60Hz 1.0kVA

Manual

Tetron braided hose (inner diameter 9mm x outer diameter 15mm)
*Please prepare cooling water piping by yourself.

4.0×10-3Pa/10min
10-4Pa/10min (when using liquid nitrogen)

1.5 L/min (Water temperature: 20~25℃, Water pressure: 200kPa (gauge pressure))

□50mm ・ □220mm (Max)
*1: The maximum substrate size is the value without considering film thickness distribution.

Rp1/4 (with easy-touch fitting)

4.0×10-4Pa
1.3×10-4Pa (when using liquid nitrogen)

Oil diffusion pump (water cooling) 1,100L/sec
*2: We will arrange it to turbo molecular pump (TMP) specifications.

Butterfly valve

20 ports (14 on the side/6 on the bottom)

GP-1G

Option

Class D (ground resistance value 100Ω or less)

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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