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  3. Vacuum Vapor Deposition Devices
  4. Batch type high vacuum evaporation equipment ei series (ULVAC Sales Co., Ltd.)
Batch type high vacuum evaporation equipment ei series-Ei series
Batch type high vacuum evaporation equipment ei series-ULVAC Sales Co., Ltd.

Batch type high vacuum evaporation equipment ei series
ULVAC Sales Co., Ltd.

About This Product

■Summary

The batch type high vacuum evaporation equipment ei series is an equipment for forming metal and oxide films on substrates. It is suitable for research and development and small-scale production because exhaust and film deposition operations can be performed automatically under centralized control from the operation panel.

■Applications

・Compound related to power devices etc. ・LED, LD, high speed device ・For various experiments ・Other electronic parts in general

■Features

・Can be equipped with various evaporation sources (EB, resistance, EB+resistance) ・Substrate holder according to the process (lift-off, planetary, satellite, etc.) ・Supports various substrates from φ2 in to 6 in, rectangular substrates, Si, compound, glass, and ceramic. - Centralized display and operation on the LCD touch panel ・Excellent operability and functions using PC (recipe function, data logging, maintenance assist function)

  • Product

    Batch type high vacuum evaporation equipment ei series

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1 Models of Batch type high vacuum evaporation equipment ei series

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Batch type high vacuum evaporation equipment ei series-Part Number-Ei series

Ei series

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About Company Handling This Product

ULVAC Sales Co., Ltd.

  • Japan

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Vacuum Vapor Deposition Devices　ULVAC Sales Co., Ltd.
ULVAC Sales Co., Ltd.

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