Driving force for high-quality wafer development Raman microscope with wafer stage RAMANdrive
Cosmo Trading Co., Ltd.
About This Product
This is a Raman microscope equipped with a 300mm wafer stage. It is also possible to read coordinate data obtained by foreign object/defect inspection equipment.
■Stage navigation system
Our proprietary stage navigation system reads the coordinate data obtained by the user's foreign object/defect inspection equipment and moves the stage accurately and smoothly electrically to the coordinates of the foreign object or defect on the sample. You can concentrate on analysis work without spending time searching for samples.
■Equipped with a proprietary 300mm wafer stage
Equipped with a dedicated stage that can accommodate large diameter wafers up to 300mm. The vacuum suction mechanism allows the wafer to be firmly fixed on the stage while always keeping it horizontal. Because the stage has a wide movable range, it is possible to center the field of view and measure any location from one end of the wafer to the other. Tall samples other than wafers can also be placed in the groove in the center of the stage.
■High-performance Raman spectroscopic imaging
In order to dramatically increase the acquisition speed of Raman images, we have developed a unique line illumination technology that stretches a laser beam into a line and irradiates it onto the sample. 400 Raman spectra are detected simultaneously from the line-shaped irradiated area on the sample. In addition, by installing a high-precision scanning mirror, imaging using laser beam scanning is realized.
Once the analysis area is specified, high-definition Raman images of over 100,000 pixels can be acquired in just a few minutes without moving the stage at all.
Equipped with high-quality confocal optics, RAMANdrive boasts the highest spatial resolution in all XYZ directions. This high resolution also contributes to dramatically increasing the detection sensitivity of microparticles of 100 nm or less. Excellent spectral resolution and peak positioning accuracy enable highly accurate stress and polytype analysis.
■Identification of minute foreign matter of 100nm or less
Best-in-class spatial resolution dramatically increases detection sensitivity for particles smaller than the spot size. The optional high-quality dark-field observation function clearly confirms the position of minute foreign objects of 100 nm or less, and high-precision laser beam scanning precisely irradiates the laser beam to the center of the foreign object. Since Raman spectra with high S/N can be obtained, highly accurate foreign matter identification is possible.
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Driving force for high-quality wafer development Raman microscope with wafer stage RAMANdrive
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Handling Company
Cosmo Trading Co., Ltd.
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1 Models of Driving force for high-quality wafer development Raman microscope with wafer stage RAMANdrive
| Product Image | Part Number | Price (excluding tax) | Detector | Grating | Laser irradiation method | Laser wavelength | Peak positioning accuracy | Size (W×H×D) | Spatial resolution (X / Y / Z) | Spectral measurement range | Spectral pixel resolution | Spectral resolution (FWHM) | Spectrometer focal length | Weight |
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RAMANdrive |
Available upon quote | Electronically cooled CCD 1340 × 400 pixels | Built-in 3 pieces from 150, 300, 600, 1,200, 1,800, 2,400 g/mm | Point lighting/line lighting | 325nm, 355nm, 488nm, 532nm, 671nm, 785nm, etc. | 0.1cm-1 (@532nm, 2,400 g/mm) | 1,276 × 1,350 × 1,320mm (including vibration isolation table) | 350nm / 500nm / 1,000nm (@532nm, 100x 0.90NA) | 100cm-1~ (Option: 50cm-1~) | 0.4cm-1/pixel (@785nm, 1,200 g/mm) | 1.2cm-1 (@785nm, 1,200 g/mm) | 550mm | 390kg (including vibration isolation table) |
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About Company Handling This Product
- Japan