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  4. Pressure regulator for semiconductors Standard model for primary side low pressure TORR-30 series (NISSAN TANAKA CORPORATION)
Pressure regulator for semiconductors Standard model for primary side low pressure TORR-30 series-TORR-30-3W-A006-4UF4UF
Pressure regulator for semiconductors Standard model for primary side low pressure TORR-30 series-NISSAN TANAKA CORPORATION

Pressure regulator for semiconductors Standard model for primary side low pressure TORR-30 series
NISSAN TANAKA CORPORATION

NISSAN TANAKA CORPORATION's Response Status

Response Rate

100.0%

Response Time

52.9hours

About This Product

■Features

・The TORR series is a pressure regulator that can be said to be synonymous with pressure regulators for semiconductor gases, and has a long track record and is highly trusted. -All assembly is done in a 0.3μm class 1000 clean room. - A filter is built into the flow path of the primary chamber to reduce internal leaks. ・Conducted shipping inspection on all units including He leak test. ・It is also possible to manufacture products with electrolytic polishing specifications. (Surface roughness of metal parts in contact with gas Ra0.25μm) ・The TORR-30 series is a standard model for primary low pressure and can be used for a wide range of equipment after depressurization, such as valve boxes and piping down to indoor rooms. Material used

■Gas contact part

・Body: SUS316L ・Diaphragm: SUS316L ・Filter: SUS316 ・Pressure gauge: SUS316L ・Fittings: SUS316 (screw connection), SUS316L (welding connection) ・Other gas contact parts: SUS316L, SUS316, fluororesin

■Non-gas contact part

・Cap: C3771 ・Pressure adjustment handle: ABS resin, C3604

■Performance

・Maximum working pressure on inlet side: 5MPa ・Outlet side maximum working pressure: 1.0MPa ・Maximum flow rate: 300L/min (nor () P1=1.0MPa, P2=0.6MPa, N2 GAS) ・Using temperature: -5~40°C ・Weight: 1.1kg ・Built-in filter filtration rate: 20μm ・Entrance/exit port diameter: 1/4" ・External leakage: 1.3×10-9Pa・m3/sec or less (screw connection), 1.3×10-10Pa・m3/sec or less (welded connection) *Other product numbers are available.

  • Product

    Pressure regulator for semiconductors Standard model for primary side low pressure TORR-30 series

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10 Models of Pressure regulator for semiconductors Standard model for primary side low pressure TORR-30 series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Joint type/shape 2 Joint type/shape 1 Structure Secondary pressure gauge (maximum working pressure) Number of ports
Pressure regulator for semiconductors Standard model for primary side low pressure TORR-30 series-Part Number-TORR-30-3W-A006-4UF4UF

TORR-30-3W-A006-4UF4UF

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

Welding connections

-0.1~0.6MPa (0.4MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A003-4UF4UF

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

Welding connections

-0.1~0.3MPa (0.2MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A010-4UF4UF

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

Welding connections

-0.1~1.0MPa (0.7MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A015-4UF4UF

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

Welding connections

-0.1~1.5MPa (1.0MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A006-4VF4VF

Available upon quote

1/4" VCR fitting female

1/4" VCR fitting female

Welding connections

-0.1~0.6MPa (0.4MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A003-4VF4VF

Available upon quote

1/4" VCR fitting female

1/4" VCR fitting female

Welding connections

-0.1~0.3MPa (0.2MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A010-4VF4VF

Available upon quote

1/4" VCR fitting female

1/4" VCR fitting female

Welding connections

-0.1~1.0MPa (0.7MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A015-4VF4VF

Available upon quote

1/4" VCR fitting female

1/4" VCR fitting female

Welding connections

-0.1~1.5MPa (1.0MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A006-4CF4CF

Available upon quote

1/4" CVC fitting female

1/4" CVC fitting female

Welding connections

-0.1~0.6MPa (0.4MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

TORR-30-3W-A003-4CF4CF

Available upon quote

1/4" CVC fitting female

1/4" CVC fitting female

Welding connections

-0.1~0.3MPa (0.2MPa)

3 ports (inlet, outlet, secondary pressure gauge port)

Click on the part number for more information about each product

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About Company Handling This Product

NISSAN TANAKA CORPORATION

Response Rate

100.0%

Response Time

52.9hrs

Company Overview

Nissan Tanaka Corporation, established in 2002 and headquartered in Saitama, Japan, is a manufacturer of cutti...

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  • Japan

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Pressure Regulators　NISSAN TANAKA CORPORATION
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