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  4. Pressure regulator for semiconductors Tide diaphragm type model for liquefied gas S-TORRVT50 series (NISSAN TANAKA CORPORATION)
Pressure regulator for semiconductors Tide diaphragm type model for liquefied gas S-TORRVT50 series-STVT50-3WE-50X06G-4UB4UB-T
Pressure regulator for semiconductors Tide diaphragm type model for liquefied gas S-TORRVT50 series-NISSAN TANAKA CORPORATION

Pressure regulator for semiconductors Tide diaphragm type model for liquefied gas S-TORRVT50 series
NISSAN TANAKA CORPORATION

NISSAN TANAKA CORPORATION's Response Status

Response Rate

100.0%

Response Time

52.9hours

About This Product

■Features

・The S-TORR regulator is a pressure regulator for ultra-high purity gases developed based on the TORR regulator, which has gained tremendous trust in semiconductor process gas lines. ・By eliminating the screw structure on the gas-contact parts and applying electrolytic polishing as standard, we have achieved extremely high moisture displacement characteristics and particle reduction. ・The connection between the main body and the joint is welded, and the external seal on the diaphragm uses a metal seal structure. Due to its high external sealing properties, it can be used with confidence even with particularly high purity gases. - A filter is built into the flow path of the primary chamber to reduce internal leaks. ・Conducted shipping inspection on all units including He leak test. ・The STVT50 series uses a tied diaphragm type and has a structure that is strong against the supply of liquefied gas. ・Springs have been removed from gas contact parts to reduce the risk of particle generation. ・By heating and supplying, we can also handle gases with vapor pressures of 1.0 MPa or higher. Maximum working pressure 2.5MPa. - For use with corrosive gases, we offer the SH series, which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts that come into contact with the gas. Material used

■Gas contact part

・Body: SUS316L ・Diaphragm: SUS316L / Ni-Cr-Mo alloy (STVT50SH) ・Filter: SUS316L / Ni-Cr-Mo alloy (STVT50SH) ・Pressure gauge: SUS316L ・Fitting: SUS316L ・Other gas contact parts: SUS316L, SUS316, fluororesin / Ni-Cr-Mo alloy, SUS316L, fluororesin (STV50SH)

■Non-gas contact part

・Cap: C3604 ・Pressure adjustment handle: ABS resin, C3604

■Performance

・Inlet side maximum working pressure: 2.5MPa Outlet side maximum working pressure: 0.6MPa ・Maximum flow rate: 220L/min (nor) (P1=1.0MPa, P2=0.6MPa, N2 GAS) ・Using temperature: -5~40°C ・Weight: 1.8kg (2 ports), 2.0kg (3 ports) ・Built-in filter filtration rate: 20μm / 10μm (STVT50SH) ・Surface roughness of metal parts in contact with gas: Ra0.25μm (Option: Ra0.1μm) Inlet/outlet port diameter: 1/4" ・External leakage amount: 1.3×10-11Pa・m3/sec or less

  • Product

    Pressure regulator for semiconductors Tide diaphragm type model for liquefied gas S-TORRVT50 series

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10 Models of Pressure regulator for semiconductors Tide diaphragm type model for liquefied gas S-TORRVT50 series

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Image Part Number Price (excluding tax)

STVT50-3WE-50X03G-4UB4UB-T

Available upon quote
Pressure regulator for semiconductors Tide diaphragm type model for liquefied gas S-TORRVT50 series-Part Number-STVT50-3WE-50X06G-4UB4UB-T

STVT50-3WE-50X06G-4UB4UB-T

Available upon quote

STVT50-3WE-50X10G-4UB4UB-T

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STVT50-3WE-50X03X-4UB4UB-T

Available upon quote

STVT50-3WE-50X06X-4UB4UB-T

Available upon quote

STVT50-3WE-50X10X-4UB4UB-T

Available upon quote

STVT50-3WE-50X03F-4UB4UB-T

Available upon quote

STVT50-3WE-50X06F-4UB4UB-T

Available upon quote

STVT50-3WE-50X10F-4UB4UB-T

Available upon quote

STVT50-3WE-50X03B-4UB4UB-T

Available upon quote

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About Company Handling This Product

NISSAN TANAKA CORPORATION

Response Rate

100.0%

Response Time

52.9hrs

Company Overview

Nissan Tanaka Corporation, established in 2002 and headquartered in Saitama, Japan, is a manufacturer of cutti...

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  • Japan

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