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  4. Semiconductor pressure regulator Negative pressure control, low vapor pressure model S-TORRVA10 series (NISSAN TANAKA CORPORATION)
Semiconductor pressure regulator Negative pressure control, low vapor pressure model S-TORRVA10 series-STVA10-3WE-15X03G-4UBUB-F
Semiconductor pressure regulator Negative pressure control, low vapor pressure model S-TORRVA10 series-NISSAN TANAKA CORPORATION

Semiconductor pressure regulator Negative pressure control, low vapor pressure model S-TORRVA10 series
NISSAN TANAKA CORPORATION

NISSAN TANAKA CORPORATION's Response Status

Response Rate

100.0%

Response Time

52.9hours

About This Product

■Features

・The S-TORR regulator is a pressure regulator for ultra-high purity gases developed based on the TORR regulator, which has gained tremendous trust in semiconductor process gas lines. ・By eliminating the screw structure on the gas-contact parts and applying electrolytic polishing as standard, we have achieved extremely high moisture displacement characteristics and particle reduction. ・The connection between the main body and the joint is welded, and the external seal on the diaphragm uses a metal seal structure. Due to its high external sealing properties, it can be used with confidence even with particularly high purity gases. - A filter is built into the flow path of the primary chamber to reduce internal leaks. ・Conducted shipping inspection on all units including He leak test. - The STVA10 series supports negative pressure control and can be used in cylinder cabinets that supply low vapor pressure liquefied gas under negative pressure. ・Springs have been removed from gas contact parts to reduce the risk of particle generation. -Uses a tied diaphragm type. - For use with corrosive gases, we offer the SH series, which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts that come into contact with the gas. Material used

■Gas contact part

・Body: SUS316L ・Diaphragm: SUS316L / Ni-Cr-Mo alloy (STVA10SH) ・Filter: SUS316L / Ni-Cr-Mo alloy (STVA10SH) ・Pressure gauge: SUS316L ・Fitting: SUS316L ・Other gas contact parts: SUS316L, SUS316, fluororesin / Ni-Cr-Mo alloy, SUS316L, fluororesin (STVA10SH)

■Non-gas contact part

・Cap: C3604 ・Pressure adjustment handle: ABS resin, C3604 *Other product numbers are available.

  • Product

    Semiconductor pressure regulator Negative pressure control, low vapor pressure model S-TORRVA10 series

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10 Models of Semiconductor pressure regulator Negative pressure control, low vapor pressure model S-TORRVA10 series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Fitting type shape 2 Fitting type shape 1 Metal surface roughness in contact with gas With or without pressure gauge Number of ports Resin symbol by gas
Semiconductor pressure regulator Negative pressure control, low vapor pressure model S-TORRVA10 series-Part Number-STVA10-3WE-15X03G-4UBUB-F

STVA10-3WE-15X03G-4UBUB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03X-4UBUB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

Raw

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03F-4UBUB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

1/4"UJR female

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03B-4UBUB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03G-4UFUF-F

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

0.25μm

With pressure gauge

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03X-4UFUF-F

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

0.25μm

Raw

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03F-4UFUF-F

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

0.25μm

1/4"UJR female

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03B-4UFUF-F

Available upon quote

1/4" UJR fitting female

1/4" UJR fitting female

0.25μm

With pressure gauge

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03G-4VFVF-F

Available upon quote

1/4" VCR fitting female

1/4" VCR fitting female

0.25μm

With pressure gauge

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

STVA10-3WE-15X03X-4VFVF-F

Available upon quote

1/4" VCR fitting female

1/4" VCR fitting female

0.25μm

Raw

3 ports
(Inlet, outlet, secondary pressure gauge port)

Gas containing Cl2, SiCl4, SiH2Cl2 WF6

Click on the part number for more information about each product

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About Company Handling This Product

NISSAN TANAKA CORPORATION

Response Rate

100.0%

Response Time

52.9hrs

Company Overview

Nissan Tanaka Corporation, established in 2002 and headquartered in Saitama, Japan, is a manufacturer of cutti...

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  • Japan

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Pressure Regulators　NISSAN TANAKA CORPORATION
NISSAN TANAKA CORPORATION

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