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  4. Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series (NISSAN TANAKA CORPORATION)
Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series-STV2300SH-3WE-15X10G-4UB4UB-F
Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series-STV2300SH-4WE-B5G06G-4UB4UB-D
Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series-NISSAN TANAKA CORPORATION

Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series
NISSAN TANAKA CORPORATION

NISSAN TANAKA CORPORATION's Response Status

Response Rate

100.0%

Response Time

52.9hours

About This Product

■Features

・The S-TORR regulator is a pressure regulator for ultra-high purity gases developed based on the TORR regulator, which has gained tremendous trust in semiconductor process gas lines. ・By eliminating the screw structure on the gas-contact parts and applying electrolytic polishing as standard, we have achieved extremely high moisture displacement characteristics and particle reduction. ・The connection between the main body and the joint is welded, and the external seal on the diaphragm uses a metal seal structure. Due to its high external sealing properties, it can be used with confidence even with particularly high purity gases. - A filter is built into the flow path of the primary chamber to reduce internal leaks. ・Conducted shipping inspection on all units including He leak test. - The STV2300SH series uses Ni-Cr-Mo alloy, which has high corrosion resistance, for all the metal parts of the regulator body that come in contact with the gas, while the STV2300AH series uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main parts that are particularly affected by corrosive gases. Materials used

■Gas contact part

・Body: SUS316L (2300SH series), Ni-Cr-Mo alloy (2300AH series) ・Diaphragm: Ni-Cr-Mo alloy ・Filter: Ni-Cr-Mo alloy ・Pressure gauge: SUS316L ・Fittings: SUS316L (2300SH series), Ni-Cr-Mo alloy (2300AH series) ・Other gas contact parts: Ni-Cr-Mo alloy, SUS316L, fluororesin (2300SH series), Ni-Cr-Mo alloy, fluororesin (2300AH series)

■Non-gas contact part

・Cap: C3604 ・Pressure adjustment handle: ABS resin, C3604

■Performance

・Maximum working pressure on inlet side: 15MPa ・Outlet side maximum working pressure: 1.0MPa ・Maximum flow rate: 10L/min (nor) (P1=0.6MPa, P2=0.1~0.4MPa, Cl2 GAS), 35L/min (nor) (P1=4.5MPa, P2=0.1~0.4MPa, HCl GAS), 400L/min (nor) (P1=10MPa, P2=1.0MPa, N2 GAS) ・Using temperature: -5~40°C ・Weight: 1.7kg (2 ports), 2.1kg (4 ports) ・Built-in filter filtration rate: 10μm ・Surface roughness of metal parts in contact with gas: Ra0.25μm ・Entrance/exit port diameter: 1/4" ・External leakage amount: 1.3×10-11Pa・m3/sec or less *Other product numbers are available.

  • Product

    Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series

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10 Models of Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Fitting type shape 2 Fitting type shape 1 Metal surface roughness in contact with gas Presence of secondary side pressure gauge Secondary pressure gauge (maximum working pressure) Presence of primary side pressure gauge Primary side pressure gauge (maximum working pressure) Number of ports Resin symbol by gas
Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series-Part Number-STV2300SH-3WE-15X10G-4UB4UB-F

STV2300SH-3WE-15X10G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~10.MPa (06.MPa)

Raw

-0.1~1.5MPa (1.0MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-03X10G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~10.MPa (06.MPa)

Raw

-0.1~0.3MPa (0.2MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-06X10G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~10.MPa (06.MPa)

Raw

-0.1~0.6MPa (0.4MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-10X10G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~10.MPa (06.MPa)

Raw

-0.1~1.0MPa (0.6MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-50X10G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~10.MPa (06.MPa)

Raw

0~5MPa (3.0MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-A0X10G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~10.MPa (06.MPa)

Raw

0~10MPa (6.0MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-B5X10G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~10.MPa (06.MPa)

Raw

0~25MPa (15.0MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-15X06G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~06.MPa (04.MPa)

Raw

-0.1~1.5MPa (1.0MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

STV2300SH-3WE-03X06G-4UB4UB-F

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~06.MPa (04.MPa)

Raw

-0.1~0.3MPa (0.2MPa)

3 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Gas containing any of Cl2, SiCl4, SiH2Cl2, WF6

Pressure regulator for semiconductors Corrosive gas model S-TORRV2300SH / 2300AH series-Part Number-STV2300SH-4WE-B5G06G-4UB4UB-D

STV2300SH-4WE-B5G06G-4UB4UB-D

Available upon quote

1/4" UJR female nut (with pure ring)

1/4" UJR female nut (with pure ring)

0.25μm

With pressure gauge

-01.~06.MPa (04.MPa)

With pressure gauge

0~25MPa (15.0MPa)

4 ports
(Inlet, outlet, primary pressure gauge, secondary pressure gauge port)

Resin material PCTFE

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About Company Handling This Product

NISSAN TANAKA CORPORATION

Response Rate

100.0%

Response Time

52.9hrs

Company Overview

Nissan Tanaka Corporation, established in 2002 and headquartered in Saitama, Japan, is a manufacturer of cutti...

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  • Japan

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Pressure Regulators　NISSAN TANAKA CORPORATION
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