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  4. Pressure regulator for semiconductors Medium flow model for low pressure on the primary side S-TORRV50 / 50SH series (NISSAN TANAKA CORPORATION)
Pressure regulator for semiconductors Medium flow model for low pressure on the primary side S-TORRV50 / 50SH series-STV50-3WE-30X03G-6UB6UB-T
Pressure regulator for semiconductors Medium flow model for low pressure on the primary side S-TORRV50 / 50SH series-NISSAN TANAKA CORPORATION

Pressure regulator for semiconductors Medium flow model for low pressure on the primary side S-TORRV50 / 50SH series
NISSAN TANAKA CORPORATION

NISSAN TANAKA CORPORATION's Response Status

Response Rate

100.0%

Response Time

52.9hours

About This Product

■Features

・The S-TORR regulator is a pressure regulator for ultra-high purity gases developed based on the TORR regulator, which has gained tremendous trust in semiconductor process gas lines. ・By eliminating the screw structure on the gas-contact parts and applying electrolytic polishing as standard, we have achieved extremely high moisture displacement characteristics and particle reduction. ・The connection between the main body and the joint is welded, and the external seal on the diaphragm uses a metal seal structure. Due to its high external sealing properties, it can be used with confidence even with particularly high purity gases. - A filter is built into the flow path of the primary chamber to reduce internal leaks. ・Conducted shipping inspection on all units including He leak test. - The STV50 series is a medium flow rate model for primary low pressure, and is widely used in low pressure piping, outlet panels, and liquefied gas cylinder cabinets that require a higher flow rate than the STV30. - For use with corrosive gases, we offer the SH series, which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts that come into contact with the gas. Material used

■Gas contact part

・Body: SUS316L ・Diaphragm: SUS316L / Ni-Cr-Mo alloy (STV50SH) ・Filter: SUS316L / Ni-Cr-Mo alloy (STV50SH) ・Pressure gauge: SUS316L ・Fitting: SUS316L ・Other gas contact parts: SUS316L, SUS316, fluororesin / Ni-Cr-Mo alloy, SUS316L, fluororesin (STV50SH)

■Non-gas contact part

・Cap: C3604 ・Pressure adjustment handle: ABS resin, C3604

■Performance

・Maximum working pressure on inlet side: 1.5MPa ・Outlet side maximum working pressure: 0.6MPa ・Maximum flow rate: 420L/min (nor () P1=0.7MPa, P2=0.6MPa, N2 GAS) ・Using temperature: -5~40°C ・Weight: 1.8kg (2 ports), 2.0kg (3 ports) ・Built-in filter filtration rate: 10μm ・Surface roughness of metal parts in contact with gas: Ra0.25μm ・Entrance/exit port diameter: 3/8" ・External leakage amount: 1.3×10-11Pa・m3/sec or less *Other product numbers are available.

  • Product

    Pressure regulator for semiconductors Medium flow model for low pressure on the primary side S-TORRV50 / 50SH series

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10 Models of Pressure regulator for semiconductors Medium flow model for low pressure on the primary side S-TORRV50 / 50SH series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Joint type/shape 2 Joint type/shape 1 Metal surface roughness in contact with gas With or without pressure gauge Secondary pressure gauge (maximum working pressure) Number of ports Resin symbol by gas

STV50-2WE-30X03X-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

Raw

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X06X-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

Raw

-0.1~0.6MPa (0.4MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X10X-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

Raw

-0.1~1.0MPa (0.6MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X03G-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

With pressure gauge

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X06G-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

With pressure gauge

-0.1~0.6MPa (0.4MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X10G-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

With pressure gauge

-0.1~1.0MPa (0.6MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X03F-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

1/4"UJR female

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X06F-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

1/4"UJR female

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

STV50-2WE-30X10F-6UF6UF-T

Available upon quote

3/8" UJR fitting female

3/8" UJR fitting female

0.25μm

1/4"UJR female

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

Resin material PTFE

Pressure regulator for semiconductors Medium flow model for low pressure on the primary side S-TORRV50 / 50SH series-Part Number-STV50-3WE-30X03G-6UB6UB-T

STV50-3WE-30X03G-6UB6UB-T

Available upon quote

3/8" UJR fitting UJR female nut (with pure ring)

3/8" UJR fitting UJR female nut (with pure ring)

0.25μm

With pressure gauge

-0.1~0.3MPa (0.2MPa)

3 ports
(Inlet, outlet, secondary pressure gauge port)

Resin material PTFE

Click on the part number for more information about each product

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About Company Handling This Product

NISSAN TANAKA CORPORATION

Response Rate

100.0%

Response Time

52.9hrs

Company Overview

Nissan Tanaka Corporation, established in 2002 and headquartered in Saitama, Japan, is a manufacturer of cutti...

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  • Japan

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Pressure Regulators　NISSAN TANAKA CORPORATION
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