All Categories

History

  1. Metoree
  2. Controllers
  3. Pressure Regulators
  4. Pressure regulator for semiconductors Standard model for primary side low pressure S-TORRV30 / 30SH series (NISSAN TANAKA CORPORATION)
Pressure regulator for semiconductors Standard model for primary side low pressure S-TORRV30 / 30SH series-STV30-3WE-30X03G-4UB4UB-T
Pressure regulator for semiconductors Standard model for primary side low pressure S-TORRV30 / 30SH series-NISSAN TANAKA CORPORATION

Pressure regulator for semiconductors Standard model for primary side low pressure S-TORRV30 / 30SH series
NISSAN TANAKA CORPORATION

NISSAN TANAKA CORPORATION's Response Status

Response Rate

100.0%

Response Time

52.9hours

About This Product

85L/min (nor () P1=0.7MPa, P2=0.6MPa, N2 GAS)

■Features

・The S-TORR regulator is a pressure regulator for ultra-high purity gases developed based on the TORR regulator, which has gained tremendous trust in semiconductor process gas lines. ・By eliminating the screw structure on the parts in contact with gas and applying electrolytic polishing as standard, we have achieved extremely high water displacement characteristics and particle reduction. ・The connection between the main body and the joint is welded, and the external seal on the diaphragm uses a metal seal structure. Due to its high external sealing properties, it can be used with confidence even with particularly high purity gases. - A filter is built into the flow path of the primary chamber to reduce internal leaks. ・Conducted shipping inspection on all units including He leak test. ・The STV30 series is a standard model for primary low pressure and is widely used in low pressure piping, outlet panels, cylinder cabinets for compressed gas with low filling pressure, etc. - For use with corrosive gases, we offer the SH series, which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts that come into contact with the gas.

■Materials used

Gas contact part ・Body: SUS316L ・Diaphragm: SUS316L / Ni-Cr-Mo alloy (STV30SH) ・Filter: SUS316L / Ni-Cr-Mo alloy (STV30SH) ・Pressure gauge: SUS316L ・Fitting: SUS316L ・Other gas contact parts: SUS316L, SUS316, fluororesin /Ni-Cr-Mo alloy, SUS316L, fluororesin (STV30SH) Non-gas contact part ・Cap: C6782 ・Pressure adjustment handle: ABS resin, C3604

■Performance

・Maximum working pressure on inlet side: 1.5MPa ・Outlet side maximum working pressure: 0.6MPa ・Maximum flow rate: 85L/min (nor) (P1=0.7MPa, P2=0.6MPa, N2 GAS) ・Using temperature: -5~40°C ・Weight: 1.2kg (2 ports), 1.4kg (3 ports) ・Built-in filter filtration rate: 10μm ・Surface roughness of metal parts in contact with gas: Ra0.25μm (Option: Ra0.1μm) ・Entrance/exit port diameter: 1/4" ・External leakage amount: 1.3×10-11Pa・m3/sec or less *Other product numbers are available.

  • Product

    Pressure regulator for semiconductors Standard model for primary side low pressure S-TORRV30 / 30SH series

Share this product


280+ people viewing

Last viewed: 3 hours ago

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

10 Models of Pressure regulator for semiconductors Standard model for primary side low pressure S-TORRV30 / 30SH series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Joint type/shape 2 Joint type/shape 1 Metal surface roughness in contact with gas With or without pressure gauge Secondary pressure gauge (maximum working pressure) Number of ports Size Resin symbol by gas

STV30-2WE-30X03X-4UF4UF-T

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

Raw

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

Resin material PTFE

STV30-2WE-30X03X-4UF4UF-N

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

Raw

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

N2O mixed gas

STV30-2WE-30X03X-4UF4UF-A

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

Raw

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

BCl3 mixed gas

STV30-2WE-30X03X-4UF4UF-F

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

Raw

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

Cl2, SiCl4, SiH2Cl2, WF6
gas containing any

STV30-2WE-30X03X-4UF4UF-D

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

Raw

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

Freon gas
(C3F8, C4F6, C4F8, C5F8, ClF3, SF6)

STV30-2WE-30X03G-4UF4UF-T

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

With pressure gauge

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

Resin material PTFE

STV30-2WE-30X03G-4UF4UF-N

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

With pressure gauge

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

N2O mixed gas

STV30-2WE-30X03G-4UF4UF-A

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

With pressure gauge

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

BCl3 mixed gas

STV30-2WE-30X03G-4UF4UF-F

Available upon quote

UJR fitting female

UJR fitting female

0.25μm (standard)

With pressure gauge

-0.1~0.3MPa (0.2MPa)

2 ports
(Entrance and exit only)

1/4" (standard)

Cl2, SiCl4, SiH2Cl2, WF6
gas containing any

Pressure regulator for semiconductors Standard model for primary side low pressure S-TORRV30 / 30SH series-Part Number-STV30-3WE-30X03G-4UB4UB-T

STV30-3WE-30X03G-4UB4UB-T

Available upon quote

UJR fittings
UJR female nut (with pure ring)

UJR fittings
UJR female nut (with pure ring)

0.25μm (standard)

With pressure gauge

-0.1~0.3MPa (0.2MPa)

3 ports
(Inlet, outlet, secondary pressure gauge port)

1/4" (standard)

Resin material PTFE

Click on the part number for more information about each product

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Fluid measurement control equipment Pressure control valve-KOFLOC Corp.

Fluid measurement control equipment Pressure control valve

KOFLOC Corp.

5.0

350+ people viewing

Last viewed: 29 minutes ago

Response time: 16.46 hours

Pressure Regulators

12 models listed

Room pressure controller ideal for controlling differential pressure in clean rooms [PEC-X]-Okaya Seiryu Kogyo Co., Ltd.

Room pressure controller ideal for controlling differential pressure in clean rooms [PEC-X]

Okaya Seiryu Kogyo Co., Ltd.

40+ people viewing

Last viewed: 1 hour ago

Pressure Regulators
Pressure regulator for standard gas push cans (eco-CAN)-Yagyu Shokai Co., Ltd.

Pressure regulator for standard gas push cans (eco-CAN)

Yagyu Shokai Co., Ltd.

20+ people viewing

Response time: 2.69 hours

Pressure Regulators
Minimize pressure fluctuations L.TEX9220 Series Super high -pressure automatic back pressure valve-Elteex Co., Ltd.

Minimize pressure fluctuations L.TEX9220 Series Super high -pressure automatic back pressure valve

Elteex Co., Ltd.

260+ people viewing

Last viewed: 1 hour ago

Response time: 4.20 hours

Pressure Regulators
Mansei Housing/Architectural Developed Products Mansei Solutions-️Nature Grace Ltd.

Mansei Housing/Architectural Developed Products Mansei Solutions

️Nature Grace Ltd.

30+ people viewing

Last viewed: 15 hours ago

Pressure Regulators

2 models listed

L.TEX9210 type fully automatic back pressure valve pressure program function can save labor.-Elteex Co., Ltd.

L.TEX9210 type fully automatic back pressure valve pressure program function can save labor.

Elteex Co., Ltd.

230+ people viewing

Last viewed: 6 hours ago

Response time: 4.20 hours

Pressure Regulators
Low pressure test pump ADT901B-Maximator Fluid Technologies Co., Ltd.

Low pressure test pump ADT901B

Maximator Fluid Technologies Co., Ltd.

50+ people viewing

Last viewed: 1 hour ago

Response time: 3.00 hours

Pressure Regulators

3 models listed

Gas pressure test pump ADT914A-Maximator Fluid Technologies Co., Ltd.

Gas pressure test pump ADT914A

Maximator Fluid Technologies Co., Ltd.

60+ people viewing

Last viewed: 1 hour ago

Response time: 3.00 hours

Pressure Regulators

3 models listed

Gas high pressure test pump ADT919A-Maximator Fluid Technologies Co., Ltd.

Gas high pressure test pump ADT919A

Maximator Fluid Technologies Co., Ltd.

70+ people viewing

Last viewed: 1 hour ago

Response time: 3.00 hours

Pressure Regulators

3 models listed

Handheld hydraulic test pump ADT925-Maximator Fluid Technologies Co., Ltd.

Handheld hydraulic test pump ADT925

Maximator Fluid Technologies Co., Ltd.

50+ people viewing

Last viewed: 1 hour ago

Response time: 3.00 hours

Pressure Regulators

3 models listed

Hydraulic test pump ADT927-Maximator Fluid Technologies Co., Ltd.

Hydraulic test pump ADT927

Maximator Fluid Technologies Co., Ltd.

50+ people viewing

Last viewed: 1 hour ago

Response time: 3.00 hours

Pressure Regulators

3 models listed

Liquid high pressure calibration pump ADT946A-Maximator Fluid Technologies Co., Ltd.

Liquid high pressure calibration pump ADT946A

Maximator Fluid Technologies Co., Ltd.

40+ people viewing

Last viewed: 1 hour ago

Response time: 3.00 hours

Pressure Regulators

3 models listed

See More Pressure Regulators Products

Other products of NISSAN TANAKA CORPORATION

Reviews shown here are reviews of companies.

Low-pressure blowpipe with a structure that reduces flashback Medium-sized cutter Z Novak / No. A cutter Z Novak-NISSAN TANAKA CORPORATION

Low-pressure blowpipe with a structure that reduces flashback Medium-sized cutter Z Novak / No. A cutter Z Novak

NISSAN TANAKA CORPORATION

160+ people viewing

Last viewed: 45 minutes ago

Response time: 52.92 hours

Gas Cutting Torches

4 models listed

A wide range of cutting options from thin plates to thick plates Small cutter K/B cutter Z/C cutter S-NISSAN TANAKA CORPORATION

A wide range of cutting options from thin plates to thick plates Small cutter K/B cutter Z/C cutter S

NISSAN TANAKA CORPORATION

230+ people viewing

Last viewed: 1 hour ago

Response time: 52.92 hours

Gas Cutting Torches

5 models listed

Safe and powerful medium-pressure blowpipe that uses a tinder mixing method HC-391Z cutter/HC-338S cutter-NISSAN TANAKA CORPORATION

Safe and powerful medium-pressure blowpipe that uses a tinder mixing method HC-391Z cutter/HC-338S cutter

NISSAN TANAKA CORPORATION

80+ people viewing

Last viewed: 14 hours ago

Response time: 52.92 hours

Gas Cutting Torches

2 models listed

Gouging blowpipe Z for machining widths of 5 to 17 mm and depths of 3 to 12 mm (approximate groove dimensions)-NISSAN TANAKA CORPORATION

Gouging blowpipe Z for machining widths of 5 to 17 mm and depths of 3 to 12 mm (approximate groove dimensions)

NISSAN TANAKA CORPORATION

110+ people viewing

Response time: 52.92 hours

Gas Cutting Torches

2 models listed

Mighty-C65 scarfing blowpipe-NISSAN TANAKA CORPORATION

Mighty-C65 scarfing blowpipe

NISSAN TANAKA CORPORATION

90+ people viewing

Last viewed: 14 hours ago

Response time: 52.92 hours

Gas Cutting Torches
Mighty 1000E scarfing blowpipe-NISSAN TANAKA CORPORATION

Mighty 1000E scarfing blowpipe

NISSAN TANAKA CORPORATION

90+ people viewing

Last viewed: 6 hours ago

Response time: 52.92 hours

Gas Cutting Torches
Blowpipe mixed type (French style/Kansai style) No. 00 welder/Small welder/Medium size welder (Blowpipe mixed type) ideal for welding around 10mm from thin plates-NISSAN TANAKA CORPORATION

Blowpipe mixed type (French style/Kansai style) No. 00 welder/Small welder/Medium size welder (Blowpipe mixed type) ideal for welding around 10mm from thin plates

NISSAN TANAKA CORPORATION

490+ people viewing

Last viewed: 16 hours ago

Response time: 52.92 hours

Gas Cutting Torches

5 models listed

Blowpipe mixed type (French style/Kansai style) No. 1 welder/No. 2 welder (Blowpipe mixed type) ideal for welding from 5mm to 45mm-NISSAN TANAKA CORPORATION

Blowpipe mixed type (French style/Kansai style) No. 1 welder/No. 2 welder (Blowpipe mixed type) ideal for welding from 5mm to 45mm

NISSAN TANAKA CORPORATION

130+ people viewing

Last viewed: 4 hours ago

Response time: 52.92 hours

Gas Cutting Torches

2 models listed

Crater mixing type (German style) No. A welder S/B welder S/No. 3 welder S (crater combination type) ideal for welding and heating from thin plates to 50 mm-NISSAN TANAKA CORPORATION

Crater mixing type (German style) No. A welder S/B welder S/No. 3 welder S (crater combination type) ideal for welding and heating from thin plates to 50 mm

NISSAN TANAKA CORPORATION

170+ people viewing

Last viewed: 2 hours ago

Response time: 52.92 hours

Gas Cutting Torches

3 models listed

Blowpipe mixed type (French style/Kansai style) No. 00 welder/Small welder/Medium size welder (Blowpipe mixed type) ideal for heating around 10mm from thin plate-NISSAN TANAKA CORPORATION

Blowpipe mixed type (French style/Kansai style) No. 00 welder/Small welder/Medium size welder (Blowpipe mixed type) ideal for heating around 10mm from thin plate

NISSAN TANAKA CORPORATION

270+ people viewing

Last viewed: 13 hours ago

Response time: 52.92 hours

Gas Cutting Torches

5 models listed

HW-50LPG heater (diffusion type), ideal for heating steel plates, bending plates, removing distortion, brazing, etc.-NISSAN TANAKA CORPORATION

HW-50LPG heater (diffusion type), ideal for heating steel plates, bending plates, removing distortion, brazing, etc.

NISSAN TANAKA CORPORATION

70+ people viewing

Last viewed: 2 hours ago

Response time: 52.92 hours

N cock series (fluid coupling with automatic opening/closing valve)-NISSAN TANAKA CORPORATION

N cock series (fluid coupling with automatic opening/closing valve)

NISSAN TANAKA CORPORATION

190+ people viewing

Response time: 52.92 hours

One-Touch Fittings

20 models listed


View more products of NISSAN TANAKA CORPORATION

About Company Handling This Product

NISSAN TANAKA CORPORATION

Response Rate

100.0%

Response Time

52.9hrs

Company Overview

Nissan Tanaka Corporation, established in 2002 and headquartered in Saitama, Japan, is a manufacturer of cutti...

See More

  • Japan

Related search keywords

Pressure Regulators
Pressure Regulators　NISSAN TANAKA CORPORATION
NISSAN TANAKA CORPORATION

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2024 Metoree