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  4. Semiconductor pressure regulator Low pressure small model S-TORRV02 series (NISSAN TANAKA CORPORATION)

Semiconductor pressure regulator Low pressure small model S-TORRV02 series
NISSAN TANAKA CORPORATION

NISSAN TANAKA CORPORATION's Response Status

Response Rate

100.0%

Response Time

52.9hours

About This Product

■Features

・The S-TORR regulator is a pressure regulator for ultra-high purity gases developed based on the TORR regulator, which has gained tremendous trust in semiconductor process gas lines. ・By eliminating the screw structure on the parts in contact with gas and applying electrolytic polishing as standard, we have achieved extremely high moisture displacement characteristics and particle reduction. ・The connection between the main body and the joint is welded, and the external seal on the diaphragm uses a metal seal structure. Due to its high external sealing properties, it can be used with confidence even with particularly high purity gases. ・Conducted shipping inspection on all units including He leak test. ・The STV02 series is a very compact pressure regulator with a main body diameter of Ø35 and a standard surface distance of 70.5 mm. ・Small outlet panels can be designed. Also suitable for integration into equipment. - For use with corrosive gases, we offer the SH series, which uses a highly corrosion-resistant Ni-Cr-Mo alloy for the main metal parts that come into contact with the gas. Material used

■Gas contact part

・Body: SUS316L ・Diaphragm: Ni-Cr-Mo alloy ・Fitting: SUS316L ・Other gas contact parts: SUS316L, SUS316, fluororesin / Ni-Cr-Mo alloy, SUS316L, fluororesin (STV02SH)

■Non-gas contact part

・Cap: C3604 ・Pressure adjustment handle: ABS resin, C3604

■Performance

・Maximum working pressure on inlet side: 1.0MPa ・Outlet side maximum working pressure: 0.7MPa ・Maximum flow rate: 110L/min (nor) (P1=1.0MPa, P2=0.7MPa, N2GAS) ・Using temperature: -5~40°C ・Weight: 390g (2 ports) *This product is only available as a 2-port product. ・Surface roughness of metal parts in contact with gas: Ra0.25μm (Option: Ra0.1μm) ・Entrance/exit port diameter: 1/4" ・External leakage amount: 1.3×10-11Pa・m3/sec or less *Other product numbers are available.

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    Semiconductor pressure regulator Low pressure small model S-TORRV02 series

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10 Models of Semiconductor pressure regulator Low pressure small model S-TORRV02 series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Joint type/shape 2 Joint type/shape 1 Metal surface roughness in contact with gas Maximum working pressure on the secondary side

STV02-2WE-15X06X-4UF4UF-D

Available upon quote

1/4" UJR fitting female nut

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4UM-D

Available upon quote

1/4" UJR fitting male nut

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4UB-D

Available upon quote

1/4" UJR fitting UJR female nut (with pure ring)

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4VF-D

Available upon quote

1/4" VCR fitting female nut

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4VM-D

Available upon quote

1/4" VCR fitting male nut

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4VB-D

Available upon quote

1/4" VCR fitting UJR female nut (with pure ring)

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4PF-D

Available upon quote

1/4" UPG fitting female nut

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4PM-D

Available upon quote

1/4" UPG fitting male nut

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4PB-D

Available upon quote

1/4" UPG fitting UJR female nut (with pure ring)

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

STV02-2WE-15X06X-4UF4CF-D

Available upon quote

1/4" CVC fitting female nut

1/4" UJR fitting female nut

02.5μm (standard)

~0.4MPa

Click on the part number for more information about each product

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About Company Handling This Product

NISSAN TANAKA CORPORATION

Response Rate

100.0%

Response Time

52.9hrs

Company Overview

Nissan Tanaka Corporation, established in 2002 and headquartered in Saitama, Japan, is a manufacturer of cutti...

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  • Japan

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Pressure Regulators　NISSAN TANAKA CORPORATION
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