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Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipmentHandling Company
Y Drive Co., Ltd.Categories
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
Product Image | Part Number | Price (excluding tax) | Air chuck table | Body external dimensions | Data format | Data resolution | Focus confirmation unit | Focus unit (manual operation) | Laser scanning width | Laser spot diameter (@laser wavelength 405nm) | Laser wavelength | Reference hole position adjustment function | Repeated exposure function |
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LSU-1002 |
Available upon quote | Ceramic table or aluminum table | - | Bitmap (BMP) | ~25,400dpi | CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface | Z stage | 10mm | 2μm |
375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser) |
Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks | A function to expose a job any number of times in the stage feed direction | |
LSU-6010 |
Available upon quote | Ceramic table or aluminum table | 400×500×460mm | Bitmap (BMP) | ~5,080dpi | CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface | Z stage | 60mm | 10μm |
375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser) |
Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks | A function to expose a job any number of times in the stage feed direction | |
LSU-12522 |
Available upon quote | Ceramic table or aluminum table | - | Bitmap (BMP) | ~3,000dpi | CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface | Z stage | 125mm | 22μm |
375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser) |
Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks | A function to expose a job any number of times in the stage feed direction | |
LSU-25030 |
Available upon quote | Ceramic table or aluminum table | - | Bitmap (BMP) | ~1,500dpi | CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface | Z stage | 250mm | 30μm |
375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser) |
Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks | A function to expose a job any number of times in the stage feed direction |
Click on the part number for more information about each product