Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment

4 Models of Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment

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Part Number	Price (excluding tax)	Repeated exposure function	Reference hole position adjustment function	Laser scanning width	Laser wavelength	Laser spot diameter (@laser wavelength 405nm)	Focus confirmation unit	Focus unit (manual operation)	Data resolution	Data format	Air chuck table	Body external dimensions
LSU-1002	Available upon quote	A function to expose a job any number of times in the stage feed direction	Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks	10mm	375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser)	2μm	CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface	Z stage	~25,400dpi	Bitmap (BMP)	Ceramic table or aluminum table	-
LSU-6010	Available upon quote	A function to expose a job any number of times in the stage feed direction	Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks	60mm	375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser)	10μm	CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface	Z stage	~5,080dpi	Bitmap (BMP)	Ceramic table or aluminum table	400×500×460mm
LSU-12522	Available upon quote	A function to expose a job any number of times in the stage feed direction	Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks	125mm	375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser)	22μm	CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface	Z stage	~3,000dpi	Bitmap (BMP)	Ceramic table or aluminum table	-
LSU-25030	Available upon quote	A function to expose a job any number of times in the stage feed direction	Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks	250mm	375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser)	30μm	CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface	Z stage	~1,500dpi	Bitmap (BMP)	Ceramic table or aluminum table	-

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