Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager-LSMi-7000
Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager-Y Drive Co., Ltd.

Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager
Y Drive Co., Ltd.


About This Product

■First interference measurement using laser scanning Interference fringes appear with reflections similar to those of glossy paper, and changes of 50 nm can be detected with the interference fringes. ■Can measure 3D shapes in an area of ​​5 x 50 mm ・Using our unique multi-scan, it is possible to precisely measure even larger areas. ・It is possible to measure the shape of objects with an inclination of up to 45 degrees. ・It is also possible to detect defects such as scratches and deep holes. - Shape measurement and image acquisition of cylindrical surfaces are also possible. ・Enlarged images can be viewed on the monitor.

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    Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager

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3 Models of Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager

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Product Image Part Number Price (excluding tax)
Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager-Part Number-LSMi-7000

LSMi-7000

Available upon quote
Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager-Part Number-LSMi-7500

LSMi-7500

Available upon quote
Various FPD components Unparalleled high field of view (30×50mm) ・High resolution (standard 50nm/optional 10nm) Interferometric 3D-laser scanning imager-Part Number-LSMi-8000

LSMi-8000

Available upon quote

Click on the part number for more information about each product

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