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  4. New generation mercury-free vacuum ultraviolet surface light source VUV-SHiPLA-CS (Shiko Giken Co., Ltd.)
New generation mercury-free vacuum ultraviolet surface light source VUV-SHiPLA-CS-VUV-SHiPLA-CS (VUV standard device product)
New generation mercury-free vacuum ultraviolet surface light source VUV-SHiPLA-CS-Shiko Giken Co., Ltd.

New generation mercury-free vacuum ultraviolet surface light source VUV-SHiPLA-CS
Shiko Giken Co., Ltd.

About This Product

This product is made to order with custom specifications for development purposes.

■Small, lightweight, customizable VUV light source

A newly developed VUV/vacuum ultraviolet (160-200nm) transparent glass capillary light-emitting element is used to extract molecular beams (172nm broad emission) from xenon plasma. By taking advantage of the small size, light weight, and flexibility of the VUV-SHiPLA surface light source, unprecedented VUV applications are possible. Compatible with multiple wavelength variations such as VUV + 260nm multiband emission by combining UVC phosphors.

■Can be modularized to suit the application

Utilizing its flexible shape, it has a close-fitting structure that matches the container to be irradiated, making it possible to effectively irradiate VUV irradiation even to complex structures. We can design and manufacture ozone light source modules that efficiently generate ozone with a compact configuration.

■Optimization for surface cleaning/modification, ozone application equipment, and irradiation targets

Traditionally, 185nm low-pressure mercury lamps and 172nm xenon excimer lamps have been used as VUV light sources, but there was a need for smaller, higher output, and energy-saving light sources. Using VUV-SHiPLA, uniform close-irradiation surface modification is possible. In addition to a palm-sized ozonizer combined with a small inverter, it is also possible to create a compact ozone light source that can generate ozone from 300 to 1,000 mg/h by driving a high-output inverter.

■Customization range

・Device light emitting surface (cm): 5-12 x 1-12 ・Wavelength range: VUV+260 multiband emission, etc. ・Emission intensity: 10mW/cm2 at 172+260nm, etc. ・Power circuit board: DC12V/24V input dedicated inverter ・Modularization: dedicated air cooling structure, ozone generation, etc.

■Special order conditions

・Device light emitting surface (cm): max. 12×12 ・Wavelength range: The phosphor used will be discussed separately. ・Emission intensity: Custom specification of ozone generation amount is also possible. ・Power circuit board: Adjust the circuit according to the light source

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    New generation mercury-free vacuum ultraviolet surface light source VUV-SHiPLA-CS

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1 Models of New generation mercury-free vacuum ultraviolet surface light source VUV-SHiPLA-CS

Image Part Number Price (excluding tax) Power circuit board Emission intensity (mW/cm2) Wavelength range Modularization Device light emitting surface (cm)
New generation mercury-free vacuum ultraviolet surface light source VUV-SHiPLA-CS-Part Number-VUV-SHiPLA-CS (VUV standard device product)

VUV-SHiPLA-CS (VUV standard device product)

Available upon quote

DC12V input dedicated inverter

5mW/cm2

172nm broad

Integrated circuit/cooling fan

8×6 (tube length x array length)

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Shiko Giken Co., Ltd.

  • Japan

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