Research and development equipment/equipment Compact gas introduction system-Compact gas introduction system
Research and development equipment/equipment Compact gas introduction system-Kitano Seiki Co., Ltd.

Research and development equipment/equipment Compact gas introduction system
Kitano Seiki Co., Ltd.


About This Product

■Summary KGIS is a system for introducing gas into the chamber while maintaining the purity of the gas cylinder. A heater is installed to maintain a uniform temperature inside the system. By minimizing moisture adsorption in the piping, dry gas can be introduced into the chamber. This product is ideal for introducing vent gas and process gas. ■Features ・Designed with consideration for temperature uniformity and insulation ・Internal vacuum evacuation is possible with the exhaust port ・A dew point meter (optional) can be installed ・Temperature can be easily controlled with the attached temperature controller ・Can be easily fixed to the cylinder using the included band

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    Research and development equipment/equipment Compact gas introduction system

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1 Models of Research and development equipment/equipment Compact gas introduction system

Product Image Part Number Price (excluding tax) Actual water content in N2 gas Baking temperature Exhaust port Gas inlet/outlet Temperature controller input
Research and development equipment/equipment Compact gas introduction system-Part Number-Compact gas introduction system

Compact gas introduction system

Available upon quote 0.065vol.ppm 150℃ 3/8inch Swagelok 3/8inch Swagelok 100V (50/60Hz)

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