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History
Response Rate
100.0%
Response Time
22.5hours
Relatively Fast Response
Product
Thin film production equipment 4-element magnetron sputtering equipmentHandling Company
Kitano Seiki Co., Ltd.Categories
| Image | Part Number | Price (excluding tax) | Ultra-high vacuum chamber high temperature treatment | Ultra-high vacuum chamber surface treatment | Ultra-high vacuum chamber material | Ultra-high vacuum chamber shape | Ultra-high vacuum chamber ultimate vacuum | Ultra-high vacuum chamber leakage amount | Ultra-high vacuum chamber port | Film thickness sensor movement mechanism | Liquid nitrogen shroud material | Liquid nitrogen shroud method | Liquid nitrogen shroud treatment | Liquid nitrogen shroud leakage amount | Trestle | Compressed air | Lower flange high temperature treatment | Lower flange surface treatment | Lower flange material | Lower flange shape | Lower flange leakage amount | Bottom flange port | Motor controller | Main shutter mechanism method | Sample heating heater method | Sample heating heater reached temperature | Sample heating heater Heater material | AC200V | AC100V | 3-axis manipulator tilt direction | 3-axis manipulator Z direction | 3-axis manipulator R direction |
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Quaternary magnetron sputtering equipment |
Available upon quote |
Vacuum baking at 450℃ x 48 hours or more |
Composite electrolytic polishing mirror finish |
SUS316L |
ICF-356-N Special/203/152/114/70 |
1×10^-11Torr or less (when using liquid nitrogen shroud cooling and turbo molecular pump of 300l/s or more or ion pump of 300l/s or more) |
5×10^-11Pa・m3/sec |
ICF-203, ICF-152, ICF-114, ICF-70 |
Sensor: Crystal oscillator (optional) |
Stainless steel 316L |
Liquid nitrogen storage type (uses 8/3″ pipe) |
Buffing mirror finish, heat cycle treatment (10 times) |
5×10^-8Pa・m3/sec |
Material: SS material/Baked paint treatment (black) |
5kg/cm2 |
Vacuum baking at 450℃ x 48 hours or more |
Composite electrolytic polishing mirror finish |
SUS316L |
ICF-356/152×4/70×1 |
5×10^-11Pa・m3/sec |
ICF-203, ICF-152, ICF-114, ICF-70 |
Controller for stepping motor |
Transfer rod method (optional/motor drive) |
Claw retainer type |
Base surface temperature Max1,200℃ |
Ta (heater part) Molybdenum (main body) |
Three phase 20A |
Single phase 30A |
90° (vertical mechanism KUD-114/70SP) motor drive |
100mm (vertical mechanism KUD-114/100Z) motor drive |
360° (∞) (rotating platform KMRP-114) motor drive |
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
22.5hrs
