Thin film production equipment Beam flux monitor-Beam flux monitor
Thin film production equipment Beam flux monitor-Kitano Seiki Co., Ltd.

Thin film production equipment Beam flux monitor
Kitano Seiki Co., Ltd.


About This Product

■Summary The beam flux monitor measures the beam intensity of molecular beams using small B/A gauges as sensors. Used in MBE equipment, etc. A compact design using a rotating introduction stage realizes an ICF-70 size mounting flange. ■Features ・The sensor uses a miniature gauge manufactured by Canon Anelva, which has a proven track record in many vacuum devices. ・Mounting flange is ICF-70 ・Minimize contamination to the sensor by installing a shield cover ・Analog output possible ・Can be baked up to 200℃ ・Surface treatment minimizes gas release from component parts ・Flux strength can be easily measured by rotating at 180℃ using a rotating mechanism.

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    Thin film production equipment Beam flux monitor

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1 Models of Thin film production equipment Beam flux monitor

Product Image Part Number Price (excluding tax) Baking temperature Mounting flange Option Rotation angle Sensor
Thin film production equipment Beam flux monitor-Part Number-Beam flux monitor

Beam flux monitor

Available upon quote 200℃ (excluding connector part) ICF-70 (with tap) Up and down mechanism ±180℃ Miniature B-A gauge

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