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  4. Thin film production equipment Beam flux monitor (Kitano Seiki Co., Ltd.)
Thin film production equipment Beam flux monitor-Beam flux monitor
Thin film production equipment Beam flux monitor-Kitano Seiki Co., Ltd.

Thin film production equipment Beam flux monitor
Kitano Seiki Co., Ltd.

About This Product

■Summary

The beam flux monitor measures the beam intensity of molecular beams using small B/A gauges as sensors. Used in MBE equipment, etc. A compact design using a rotating introduction stage realizes an ICF-70 size mounting flange.

■Features

・The sensor uses a miniature gauge manufactured by Canon Anelva, which has a proven track record in many vacuum devices. ・Mounting flange is ICF-70 ・Minimize contamination to the sensor by installing a shield cover ・Analog output possible ・Can be baked up to 200℃ ・Surface treatment minimizes gas release from component parts ・Flux strength can be easily measured by rotating at 180℃ using a rotating mechanism.

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    Thin film production equipment Beam flux monitor

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1 Models of Thin film production equipment Beam flux monitor

Image Part Number Price (excluding tax) Rotation angle Mounting flange Baking temperature Sensor Option
Thin film production equipment Beam flux monitor-Part Number-Beam flux monitor

Beam flux monitor

Available upon quote

±180℃

ICF-70 (with tap)

200℃ (excluding connector part)

Miniature B-A gauge

Up and down mechanism

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About Company Handling This Product

Kitano Seiki Co., Ltd.

  • Japan

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