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  3. Laser Scanning Microscoppes
  4. Analysis/observation/evaluation equipment UHV compatible laser microscope equipment (Kitano Seiki Co., Ltd.)
Analysis/observation/evaluation equipment UHV compatible laser microscope equipment-UHV compatible laser microscope device
Analysis/observation/evaluation equipment UHV compatible laser microscope equipment-Kitano Seiki Co., Ltd.

Analysis/observation/evaluation equipment UHV compatible laser microscope equipment
Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

50.9hours

About This Product

■Features

This device is an observation and inspection device that uses a scanning laser microscope to observe changes in the behavior of samples in various environments such as vacuum, high temperature, and gas atmospheres. Since it is equipped with a transfer port, it is possible to observe the sample without exposing it to the film after it has been formed by connecting it to a film forming device. The resolution of the microscope reaches 0.3 μm, and the depth of focus is deep, making it possible to measure three-dimensional shapes.

■Configuration

・Scanning laser microscope ・UHV chamber with water cooling ・TMP&RP exhaust unit ・Manipulator with heating mechanism ・Gas mixing panel (IN2 series OUT1 series)

  • Product

    Analysis/observation/evaluation equipment UHV compatible laser microscope equipment

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1 Models of Analysis/observation/evaluation equipment UHV compatible laser microscope equipment

Image Part Number Price (excluding tax) Sample size Field of view Substrate heating temperature Ultimate vacuum Magnification Gas line
Analysis/observation/evaluation equipment UHV compatible laser microscope equipment-Part Number-UHV compatible laser microscope device

UHV compatible laser microscope device

Available upon quote

10mm

1,150~230μm

Max500℃

≦1.0E-6Pa

250~1,250×

1 mixed system

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About Company Handling This Product

Kitano Seiki Co., Ltd.

Response Rate

100.0%

Response Time

50.9hrs

  • Japan

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