Analysis/observation/evaluation equipment UHV compatible laser microscope equipment
Kitano Seiki Co., Ltd.
About This Product
■Features
This device is an observation and inspection device that uses a scanning laser microscope to observe changes in the behavior of samples in various environments such as vacuum, high temperature, and gas atmospheres. Since it is equipped with a transfer port, it is possible to observe the sample without exposing it to the film after it has been formed by connecting it to a film forming device. The resolution of the microscope reaches 0.3 μm, and the depth of focus is deep, making it possible to measure three-dimensional shapes.
■Configuration
・Scanning laser microscope
・UHV chamber with water cooling
・TMP&RP exhaust unit
・Manipulator with heating mechanism
・Gas mixing panel (IN2 series OUT1 series)
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Product
Analysis/observation/evaluation equipment UHV compatible laser microscope equipment
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Handling Company
Kitano Seiki Co., Ltd.
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Categories
1 Models of Analysis/observation/evaluation equipment UHV compatible laser microscope equipment
| Product Image | Part Number | Price (excluding tax) | Field of view | Gas line | Magnification | Sample size | Substrate heating temperature | Ultimate vacuum |
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UHV compatible laser microscope device |
Available upon quote | 1,150~230μm | 1 mixed system | 250~1,250× | 10mm | Max500℃ | ≦1.0E-6Pa |
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About Company Handling This Product
- Japan