Organic vapor deposition cell KOD-Cell
Kitano Seiki Co., Ltd.
About This Product
This product is a low-temperature cell (Organic Deposition Cell: KOD-Cell) that can operate stably at low temperatures for growing thin films of high vapor pressure materials (organic materials). KOD-Cell has excellent temperature response and temperature stability by adopting an indirect heating method.
■Features
・The crucible capacity is small at 1cc, allowing for a wide range of applications and easy use.
- Carefully selected materials are used, and the simple structure makes maintenance easy.
・Uses sheath heater material to maintain uniform temperature
・Equipped with a shutter mechanism, so vapor deposition can be adjusted.
- Extremely lightweight, making it easy to install and remove
・The connecting flange is a gasket type, but it can be customized freely.
・Organic materials can be removed by simply placing it in an ultrasonic cleaner.
■Applications
・Growth of thin films of high vapor pressure materials
・Growth of organic thin film
・Growth of metal thin films (for low temperature deposition)
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Product
Organic vapor deposition cell KOD-Cell
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Handling Company
Kitano Seiki Co., Ltd.
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Categories
1 Models of Organic vapor deposition cell KOD-Cell
| Product Image | Part Number | Price (excluding tax) | Connection flange | Cooling method | Crucible capacity | Crucible material | Deposition rate | Distance between TSs | Heater | Heating control temperature | In-plane distribution | Material efficiency | Maximum stable operating temperature | Overshoot value | Shutter mechanism | Temperature stability | Thermocouple |
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KOD-Cell |
$ 3,120.00〜 | ICF-70FH | With water cooling jacket (SUS1/4” pipe) | 1cc | Shapal, high density carbon, alumina, quartz glass, AlN | 0.01Å/s is easily possible (Inficon film thickness meter is recommended) | Recommended length from substrate to evaporation source is 250mm | Sheath type | 100℃~500℃ | Organic film: ±2.5% | With 0.2g of material, 50nm film can be deposited more than 5 times at a rate of 1Å/s | 500℃ | 0.2℃ or less | Manual type/Pneumatic type (optional) | ±0.2℃ | K type (C/A) |
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About Company Handling This Product
- Japan