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Organic EL prototype device manufacturing equipment Film deposition equipment for organic material development KVD-OLED Evo.1-KVD-OLED Evo.1
Organic EL prototype device manufacturing equipment Film deposition equipment for organic material development KVD-OLED Evo.1-Kitano Seiki Co., Ltd.

Organic EL prototype device manufacturing equipment Film deposition equipment for organic material development KVD-OLED Evo.1
Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

23.6hours

Relatively Fast Response


About This Product

■Applications

・Organic EL material development ・Polymer material development ・Phosphorescent material development ・Development of organic thin film solar cells ・Organic electronic device development, etc.

■Features

・Mask and sample can be transported using the transport mechanism - Organic and metallic materials can be deposited in the same room ・Possible to co-evaporate organic materials and metal materials ・Co-evaporation of organic materials is possible (up to 4 elements) ・Equipped with water cooling jacket as standard to prevent contamination between organic materials and metal materials ・In the deposition chamber, the substrate and mask can be replaced individually in a vacuum environment. ・Minimum gap between substrate and mask ・In-plane film thickness distribution flatness within ±5% due to substrate rotation mechanism ・Organic deposition cells have excellent directivity and less material contamination inside the deposition chamber. ・Each processing chamber has a special surface treatment to quickly reach the operating vacuum environment pressure. ・Can be connected to a glove box ・Automatic conveyance and automatic exhaust are possible with PLC control. ・Standard 5 substrates and mask holders can be stocked in the introduction room.

  • Product

    Organic EL prototype device manufacturing equipment Film deposition equipment for organic material development KVD-OLED Evo.1

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1 Models of Organic EL prototype device manufacturing equipment Film deposition equipment for organic material development KVD-OLED Evo.1

Image Part Number Price (excluding tax) In-plane distribution (%) Installation space for device only (mm) Vapor deposition source (original) Substrate heating during vapor deposition Automatic exhaust Film thickness resolution (Å/s) Number of film thickness sensors installed (base) Film thickness sensor cooling method Vacuum exhaust system Organic material codeposition Deposition room (number of rooms) Number of introduction room stockers (stages) Board size (inch) Ultimate pressure (Pa) Input power Glove box connection
Organic EL prototype device manufacturing equipment Film deposition equipment for organic material development KVD-OLED Evo.1-Part Number-KVD-OLED Evo.1

KVD-OLED Evo.1

Available upon quote

Organic film within ±3% at 50mm
Metal film within ±5%

2,600×1,200

Organic: 6
Metal:3

Yes (optional)

Yes (optional)

0.0057Å/s (using INFICON CYGNUS)

Organometallic common: 4

Water cooling (can be controlled down to 0.01℃ using chiller)

Film forming chamber: Cryopump
Introduction chamber: dry pump
Dry pump (roughing pump)

Possible (Dope mixing ratio 0.1~30wt% at host 1Å/s using unique control method)

Organometallic common: 1

5

2

Deposition room + other: 10^-6 units
Introduction room: 10

3φ200V75A

Yes (optional)

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About Company Handling This Product

Response Rate

100.0%


Response Time

23.6hrs

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