Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ
Kitano Seiki Co., Ltd.
About This Product
■Deposition chamber/characteristics
・Ultra-high vacuum deposition
・Small space, compact design
・Up to 9 evaporation cells can be installed
・A wide selection of board sizes from 1 to 3 inches is possible.
・Double shield structure to prevent contamination
・Rotating platform mechanism to ensure uniformity of film
・Mask can be replaced during vapor deposition
・Base heating heater control mechanism standard equipment
・Easy design for maintenance and cleaning
■Evaluation room/characteristics
・Ultra-high vacuum evaluation
・2-pair multi-probe terminal configuration
・Two devices can be evaluated simultaneously/under the same conditions
・Gas analysis evaluation using Q-Mass is available as an option.
・Easy evaluation and measurement of lifespan and brightness
■Load lock room
・Comes with a shuttle case that can be taken out without destroying the vacuum
・Hatch mechanism that allows easy insertion and removal of the base
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Product
Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ
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Handling Company
Kitano Seiki Co., Ltd.
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Categories
1 Models of Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ
| Product Image | Part Number | Price (excluding tax) | 2 pairs multi probe | 300℃ base heating heater | Base size | Exhaust pump | Film thickness meter | Holder stock | Metal cell | Organic cell | Purge valve | Shutter | Vacuum gauge |
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OED R&D SystemⅢ |
Available upon quote | 1 set | 1 set (with power control) | 1~3 inches (up to 4 pieces can be installed) |
TMP (500L/sec): 1 unit (50L/sec): 1 unit SP (500L/min): 2 units TMP (250L/sec): 1 unit (50L/sec): 1 unit SP (250L/min): 1 unit |
2 types | 5 pieces (maximum 6 pieces) | 1 set (with power control) (dual metal vapor deposition cell) | 8 types (with power control) | 2 types | Base side shutter 1 set | Type 3 |
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About Company Handling This Product
- Japan