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  4. Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ (Kitano Seiki Co., Ltd.)
Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ-OED R&D SystemⅢ
Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ-Kitano Seiki Co., Ltd.

Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ
Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

23.6hours

Relatively Fast Response

About This Product

■Deposition chamber/characteristics

・Ultra-high vacuum deposition ・Small space, compact design ・Up to 9 evaporation cells can be installed ・A wide selection of board sizes from 1 to 3 inches is possible. ・Double shield structure to prevent contamination ・Rotating platform mechanism to ensure uniformity of film ・Mask can be replaced during vapor deposition ・Base heating heater control mechanism standard equipment ・Easy design for maintenance and cleaning

■Evaluation room/characteristics

・Ultra-high vacuum evaluation ・2-pair multi-probe terminal configuration ・Two devices can be evaluated simultaneously/under the same conditions ・Gas analysis evaluation using Q-Mass is available as an option. ・Easy evaluation and measurement of lifespan and brightness

■Load lock room

・Comes with a shuttle case that can be taken out without destroying the vacuum ・Hatch mechanism that allows easy insertion and removal of the base

  • Product

    Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ

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1 Models of Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ

Image Part Number Price (excluding tax) Metal cell Film thickness meter Vacuum gauge Organic cell Exhaust pump Base size Holder stock Purge valve Shutter 300℃ base heating heater 2 pairs multi probe
Organic EL prototype device manufacturing equipment UHV compatible organic EL film formation and evaluation equipment Ⅲ OED R&D System Ⅲ-Part Number-OED R&D SystemⅢ

OED R&D SystemⅢ

Available upon quote

1 set (with power control) (dual metal vapor deposition cell)

2 types

Type 3

8 types (with power control)

TMP (500L/sec): 1 unit
(50L/sec): 1 unit
SP (500L/min): 2 units
TMP (250L/sec): 1 unit
(50L/sec): 1 unit
SP (250L/min): 1 unit

1~3 inches (up to 4 pieces can be installed)

5 pieces (maximum 6 pieces)

2 types

Base side shutter 1 set

1 set (with power control)

1 set

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About Company Handling This Product

Kitano Seiki Co., Ltd.

Response Rate

100.0%

Response Time

23.6hrs

  • Japan

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Semiconductor Manufacturing Equipment Component & Part Machining
Semiconductor Manufacturing Equipment Component & Part Machining　Kitano Seiki Co., Ltd.
Kitano Seiki Co., Ltd.

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