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  4. Spin type single wafer processing equipment (HiSOL,Inc.)
Spin type single wafer processing equipment-Spin type single wafer processing equipment
Spin type single wafer processing equipment-HiSOL,Inc.

Spin type single wafer processing equipment
HiSOL,Inc.

HiSOL,Inc.'s Response Status

Response Rate

100.0%

Response Time

28.6hours

Relatively Fast Response

About This Product

■ If you are particular about semiconductor quality, you must also be particular about cleaning.

Achieves a full process from chemical treatment to rinsing and drying in one chamber. It is also possible to recycle and reuse temperature-controlled chemical solutions, reducing costs and environmental impact.

■Summary

・The process is completed in one chamber ・Enables temperature-controlled circulation and reuse of chemical solutions, saving energy ・Alkali and acid substrate processing can be performed in the same chamber. ・Comes with a shield plate to prevent chemical liquid from scattering during the process ・Etching and organic peeling can be processed in the same equipment ・One-shot processing from etching to mask resist removal possible ・Reducing the burden on workers and reducing the risk of human error through automation ・Even ultra-thin and fragile substrates can be processed with confidence, improving product quality

  • Product

    Spin type single wafer processing equipment

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1 Models of Spin type single wafer processing equipment

Image Part Number Price (excluding tax) Power supply Equipment dimensions Chemical supply Target wafer size Processing liquid Purpose of use Number of recipes Number of steps
Spin type single wafer processing equipment-Part Number-Spin type single wafer processing equipment

Spin type single wafer processing equipment

Available upon quote

200V, 3 layers, 50/60Hz

W2,000×D1,850×H1,960mm

Chemical solution circulation recovery

4 inches, 6 inches, 8 inches

Organic stripper, pure water

Organic cleaning/lift-off/resist stripping/cleaning

40

50

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About Company Handling This Product

HiSOL,Inc.

Response Rate

100.0%

Response Time

28.6hrs

Company Overview

Hisol Inc., established in 1967 as Kan Electronics, is a manufacturer based in Tokyo, Japan, producing machine...

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  • Japan

Related search keywords

Semiconductor Cleaning Equipment
Semiconductor Cleaning Equipment　HiSOL,Inc.
HiSOL,Inc.

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