Digital mass flow controller
FCC
About This Product
It can be used in a wide range of fields, from semiconductors and solar panels to general industries. A high -speed response of 1SEC or less [Solenoid valve adoption] is realized, corresponding to intelligence -ized gas supply lines, digital control, monitoring, and analyzing.
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Product
Digital mass flow controller
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Handling Company
FCC
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Categories
9 Models of Digital mass flow controller
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Actuator method | Bearing pressure | Communication method | Connecting joint | Control flow rate range | Current consumption current | Digital communication | External leak | Flow rate (N2 conversion flow rate) | Flow rate accuracy | Flow rate setting signal | Flowing output signal | Interviewed gas part material | Maximum operating pressure | Mounting posture | Necessary differential pressure | Power supply voltage, current consumption | Reproducibility | Response time | Sticker material | Used guarantor temperature range | Valve operation | Valve type | Warranty temperature | surface treatment |
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FCST1005 (M) F / FCST1005 (M) FD |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | - | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | 10,20,30,50,100,200,300,500scm1,2,3,5slm | ± 1 % F.S (accuracy guarantee range 15-35 ° C) | 0.1-5VDC | 0-5VDC | SUS316L, magnetic stainless steel, PTFE, (rubber seal: fluorine rubber or chloroprene rubber) | 400kpa (g) | Not specified (free) | 50-300kpa | #ERROR! | ± 0.2 % F.S | ≦ 1sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | - | - | NC: Normal Close NO: Normal Open | 5-50 ℃ | There is no option with EP processing options and rubber seals |
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FCST1030 (M) F / FCST1030 (M) FD |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | - | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | 10,20,30slm | ± 1 % F.S (accuracy guarantee range 15-35 ° C) | 0.1-5VDC | 0-5VDC | SUS316L, magnetic stainless steel, PTFE, (rubber seal: fluorine rubber or chloroprene rubber) | 400kpa (g) | Not specified (free) | NO50-300kpa (6-10SLM) 100-300kpa (11-20slm) 150-300kpa (21-30SLM) NC50 ~ 300kpa (6-10SLM) 100-300kpa (11-30SLM) | #ERROR! | ± 0.2 % F.S | ≦ 1sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | - | - | NC: Normal Close NO: Normal Open | 5-50 ℃ | There is no option with EP processing options and rubber seals |
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FCST1050 (M) F / FCST1050 (M) FD |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | - | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | 40,50SLM | ± 1 % F.S (accuracy guarantee range 15-35 ° C) | 0.1-5VDC | 0-5VDC | SUS316L, magnetic stainless steel, PTFE, (rubber seal: fluorine rubber or chloroprene rubber) | 400kpa (g) | Not specified (free) | 200-300kpa | #ERROR! | ± 0.2 % F.S | ≦ 1sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | - | - | NC: Normal Close NO: Normal Open | 5-50 ℃ | There is no option with EP processing options and rubber seals |
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FCST1200F / FCST1200FD |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 3/8 inch UJR3/8 inch F900 | 2-100 % F.S | - | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | 100,150,200SLM | ± 1 % F.S (accuracy guarantee range 15-35 ° C) | 0.1-5VDC | 0-5VDC | SUS316, PTFE, fluorine rubber or chloroprene rubber | 700kpa (g) | Not specified (free) | 100-300kpa | #ERROR! | ± 0.2 % F.S | ≦ 3sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | - | - | NC: Normal Close NO: Normal Open | 5-45 ° C | Machine processing finish |
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FCST1500F / FCST1500FD |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/2 inch UJR1/2 inch F900 | 2-100 % F.S | - | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | 300,400,500SLM | ± 2 % F.S (same left) | 0.1-5VDC | 0-5VDC | SUS316, PTFE, fluorine rubber or chloroprene rubber | 700kpa (g) | Not specified (free) | 150-300kpa | #ERROR! | ± 0.4 % F.S | ≦ 3sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | - | - | NC: Normal Close | 5-45 ° C | Machine processing finish |
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FCST2005 |
Available upon quote | Piezo actuator | 1MPa (g) | - | 1.125W-SEAL, 1.5W-SEAL, 1/4 inch UJR | 2-100 % F.S | #ERROR! | - | 1 x 10-11PA/M3/SECHE | 5,10,20,50,50,100,200,300,500scm1,2,3,5slm | 2-25 %: ± 0.25 % F.S25-100 %: ± 1 % S.P | 0.1-5VDC | 0-5VDC | SUS316L, PCTFE | 300kpa (g) | Not specified (free) | 50-300kpa | - | ± 0.2 % F.S | ≦ 1sec | Au | 5-50 ℃ | NC: Normal Close NO: Normal Open | - | - | EP processing |
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Fcst2020 |
Available upon quote | Piezo actuator | 1MPa (g) | - | 1.125W-SEAL, 1.5W-SEAL, 1/4 inch UJR | 2-100 % F.S | #ERROR! | - | 1 x 10-11PA/M3/SECHE | 10,20slm | 2-25 %: ± 0.25 % F.S25-100 %: ± 1 % S.P | 0.1-5VDC | 0-5VDC | SUS316L, PCTFE | 300kpa (g) | Not specified (free) | NO50 ~ 300kpa (10SLM) 100-300kpa (20SLM) NC100 ~ 300kpa (10SLM) 200-300kpa (20SLM) | - | ± 0.2 % F.S | ≦ 1sec | Au | 5-50 ℃ | NC: Normal Close NO: Normal Open | - | - | EP processing |
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FCST2050 |
Available upon quote | Piezo actuator | 1MPa (g) | - | 1.125W-SEAL, 1.5W-SEAL, 1/4 inch UJR | 2-100 % F.S | #ERROR! | - | 1 x 10-11PA/M3/SECHE | 30,50SLM | 2-25 %: ± 0.25 % F.S25-100 %: ± 1 % S.P | 0.1-5VDC | 0-5VDC | SUS316L, PCTFE | 300kpa (g) | Not specified (free) | 100-300kpa (30SLM) 150-300kpa (50SLM) | - | ± 0.2 % F.S | ≦ 1sec | Au | 5-50 ℃ | NC: Normal Close NO: Normal Open | - | - | EP processing |
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Fcst2150 |
Available upon quote | Solenoid actuator | 1MPa (g) | - | 3/8 inch UJR | 2-100 % F.S | #ERROR! | - | 1 x 10-11PA/M3/SECHE | 100,150SLM | ± 2 % F.S | 0.1-5VDC | 0-5VDC | SUS316L, PCTFE, FKM | 350kpa (g) | Not specified (free) | 200-350kpa (100SLM) 250-350kpa (150SLM) | - | ± 0.2 % F.S | ≦ 1sec | Au | 5-50 ℃ | NC: Normal Close | - | - | EP processing |
Click on the part number for more information about each product
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