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Digital mass flow controller-FCST1005 (M) F / FCST1005 (M) FD
Digital mass flow controller-FCST2005
Digital mass flow controller-FCC

Digital mass flow controller
FCC

FCC's Response Status

Response Rate

100.0%

Response Time

6.5hours

Fast Response


About This Product

It can be used in a wide range of fields, from semiconductors and solar panels to general industries. A high -speed response of 1SEC or less [Solenoid valve adoption] is realized, corresponding to intelligence -ized gas supply lines, digital control, monitoring, and analyzing.

  • Product

    Digital mass flow controller

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9 Models of Digital mass flow controller

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Flow rate (N2 conversion flow rate) Valve type Control flow rate range Flow rate accuracy Flow rate setting signal Flowing output signal Reproducibility Response time Necessary differential pressure Maximum operating pressure Bearing pressure Warranty temperature External leak Mounting posture Power supply voltage, current consumption Communication method Interviewed gas part material Sticker material Actuator method surface treatment Connecting joint Digital communication Valve operation Used guarantor temperature range Current consumption current
Digital mass flow controller-Part Number-FCST1005 (M) F / FCST1005 (M) FD

FCST1005 (M) F / FCST1005 (M) FD

Available upon quote

10,20,30,50,100,200,300,500scm1,2,3,5slm

NC: Normal Close NO: Normal Open

2-100 % F.S

± 1 % F.S (accuracy guarantee range 15-35 ° C)

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

50-300kpa

400kpa (g)

1MPa (g)

5-50 ℃

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316L, magnetic stainless steel, PTFE, (rubber seal: fluorine rubber or chloroprene rubber)

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

There is no option with EP processing options and rubber seals

1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL

RS485, standard communication speed 38400bps, maximum connection number 127 units

- - -
Digital mass flow controller-Part Number-FCST1030 (M) F / FCST1030 (M) FD

FCST1030 (M) F / FCST1030 (M) FD

Available upon quote

10,20,30slm

NC: Normal Close NO: Normal Open

2-100 % F.S

± 1 % F.S (accuracy guarantee range 15-35 ° C)

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

NO50-300kpa (6-10SLM) 100-300kpa (11-20slm) 150-300kpa (21-30SLM) NC50 ~ 300kpa (6-10SLM) 100-300kpa (11-30SLM)

400kpa (g)

1MPa (g)

5-50 ℃

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316L, magnetic stainless steel, PTFE, (rubber seal: fluorine rubber or chloroprene rubber)

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

There is no option with EP processing options and rubber seals

1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL

RS485, standard communication speed 38400bps, maximum connection number 127 units

- - -
Digital mass flow controller-Part Number-FCST1050 (M) F / FCST1050 (M) FD

FCST1050 (M) F / FCST1050 (M) FD

Available upon quote

40,50SLM

NC: Normal Close NO: Normal Open

2-100 % F.S

± 1 % F.S (accuracy guarantee range 15-35 ° C)

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

200-300kpa

400kpa (g)

1MPa (g)

5-50 ℃

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316L, magnetic stainless steel, PTFE, (rubber seal: fluorine rubber or chloroprene rubber)

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

There is no option with EP processing options and rubber seals

1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL

RS485, standard communication speed 38400bps, maximum connection number 127 units

- - -
Digital mass flow controller-Part Number-FCST1200F / FCST1200FD

FCST1200F / FCST1200FD

Available upon quote

100,150,200SLM

NC: Normal Close NO: Normal Open

2-100 % F.S

± 1 % F.S (accuracy guarantee range 15-35 ° C)

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 3sec

100-300kpa

700kpa (g)

1MPa (g)

5-45 ° C

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316, PTFE, fluorine rubber or chloroprene rubber

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

Machine processing finish

3/8 inch UJR3/8 inch F900

RS485, standard communication speed 38400bps, maximum connection number 127 units

- - -
Digital mass flow controller-Part Number-FCST1500F / FCST1500FD

FCST1500F / FCST1500FD

Available upon quote

300,400,500SLM

NC: Normal Close

2-100 % F.S

± 2 % F.S (same left)

0.1-5VDC

0-5VDC

± 0.4 % F.S

≦ 3sec

150-300kpa

700kpa (g)

1MPa (g)

5-45 ° C

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316, PTFE, fluorine rubber or chloroprene rubber

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

Machine processing finish

1/2 inch UJR1/2 inch F900

RS485, standard communication speed 38400bps, maximum connection number 127 units

- - -
Digital mass flow controller-Part Number-FCST2005

FCST2005

Available upon quote

5,10,20,50,50,100,200,300,500scm1,2,3,5slm

-

2-100 % F.S

2-25 %: ± 0.25 % F.S25-100 %: ± 1 % S.P

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

50-300kpa

300kpa (g)

1MPa (g)

-

1 x 10-11PA/M3/SECHE

Not specified (free)

- -

SUS316L, PCTFE

Au

Piezo actuator

EP processing

1.125W-SEAL, 1.5W-SEAL, 1/4 inch UJR

-

NC: Normal Close NO: Normal Open

5-50 ℃

#ERROR!

Digital mass flow controller-Part Number-Fcst2020

Fcst2020

Available upon quote

10,20slm

-

2-100 % F.S

2-25 %: ± 0.25 % F.S25-100 %: ± 1 % S.P

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

NO50 ~ 300kpa (10SLM) 100-300kpa (20SLM) NC100 ~ 300kpa (10SLM) 200-300kpa (20SLM)

300kpa (g)

1MPa (g)

-

1 x 10-11PA/M3/SECHE

Not specified (free)

- -

SUS316L, PCTFE

Au

Piezo actuator

EP processing

1.125W-SEAL, 1.5W-SEAL, 1/4 inch UJR

-

NC: Normal Close NO: Normal Open

5-50 ℃

#ERROR!

Digital mass flow controller-Part Number-FCST2050

FCST2050

Available upon quote

30,50SLM

-

2-100 % F.S

2-25 %: ± 0.25 % F.S25-100 %: ± 1 % S.P

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

100-300kpa (30SLM) 150-300kpa (50SLM)

300kpa (g)

1MPa (g)

-

1 x 10-11PA/M3/SECHE

Not specified (free)

- -

SUS316L, PCTFE

Au

Piezo actuator

EP processing

1.125W-SEAL, 1.5W-SEAL, 1/4 inch UJR

-

NC: Normal Close NO: Normal Open

5-50 ℃

#ERROR!

Digital mass flow controller-Part Number-Fcst2150

Fcst2150

Available upon quote

100,150SLM

-

2-100 % F.S

± 2 % F.S

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

200-350kpa (100SLM) 250-350kpa (150SLM)

350kpa (g)

1MPa (g)

-

1 x 10-11PA/M3/SECHE

Not specified (free)

- -

SUS316L, PCTFE, FKM

Au

Solenoid actuator

EP processing

3/8 inch UJR

-

NC: Normal Close

5-50 ℃

#ERROR!

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

6.5hrs

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