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  3. Semiconductor Lithography Equipment
  4. Semiconductor exposure equipment KrF stepper for IoT related devices (Canon Electronics Inc.)
Semiconductor exposure equipment KrF stepper for IoT related devices-FPA-3030EX6
Semiconductor exposure equipment KrF stepper for IoT related devices-Canon Electronics Inc.

Semiconductor exposure equipment KrF stepper for IoT related devices
Canon Electronics Inc.

Canon Electronics Inc.'s Response Status

Response Rate

100.0%

Response Time

206.6hours

About This Product

Features

■Compatible with various special boards and small boards

Equipped with the same wafer transport system as the proven i-line stepper "FPA-3030i5+", it can transport substrates of various materials, diameters, and thicknesses used in the manufacturing of IoT-related devices and power devices.

■Achieving the highest level of performance as a KrF excimer laser stepper

Inheriting the performance of the previous model "FPA-3000EX6", it achieves the highest resolution of 150 nm, overlay accuracy of 25 nm or less, and productivity (processing capacity) of 121 sheets per hour or more as a KrF excimer laser stepper in the same class.

  • Product

    Semiconductor exposure equipment KrF stepper for IoT related devices

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1 Models of Semiconductor exposure equipment KrF stepper for IoT related devices

Image Part Number Price (excluding tax) Overlay accuracy Resolution Reduction ratio Screen size Burning wavelength Main options Reticle size Wafer size NA (numerical aperture)
Semiconductor exposure equipment KrF stepper for IoT related devices-Part Number-FPA-3030EX6

FPA-3030EX6

Available upon quote

≦25nm

≦150nm

1:5

22mm×22mm

KrF248nm

Transport system for special substrates
PC remote console
GEM compatible online software
Pellicle inspection equipment

6inch

100mm (4inch) /125mm (5inch) /150mm (6inch) /200mm (8inch) (selection)

0.65~0.50 (automatically variable)

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About Company Handling This Product

Canon Electronics Inc.

Response Rate

100.0%

Response Time

206.6hrs

Related search keywords

Semiconductor Lithography Equipment
Semiconductor Lithography Equipment　Canon Electronics Inc.
Canon Electronics Inc.

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