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  4. Electropneumatic regulator APU series (FUKUDA CO., LTD.)
Electropneumatic regulator APU series-APU-508W
Electropneumatic regulator APU series-FUKUDA CO., LTD.

Electropneumatic regulator APU series
FUKUDA CO., LTD.

About This Product

This is an electro-pneumatic regulator that enables high-speed control and high-precision measurement by installing control sensors in two locations: inside the main body and on the workpiece side. We have a wide lineup ranging from small flow rates to large flow rates. In addition to pressure control, flow control specifications are also available. Please feel free to contact us.

■Product overview

・Control repeatability ±0.1% ・Responsiveness 0.5s ・Instantly control pressure and flow rate using feedback from external pressure sensor ・Continuously control pressure and flow rate by voltage control ・Pressure just before the workpiece can be monitored using an external pressure sensor ・External pressure sensor that enables ΔP control and constant differential pressure control ・Wide lineup from small to large flow rates ・Lineup rich in positive pressure, negative pressure, and compound pressure variations Sensor specifications

■SX-100D (differential pressure)

・Sensor pressure resistance 3 times that of 0 to 50kPa F.S, 2 times that of 100 to 500kPa F.S, 1.5 times that of 700 to 990kPa F.S ・Pressure receiving part material Brass (BSB) ・Sensor accuracy ±0.15%F.S. ・Temperature characteristics Zero shift ±0.03%F.S./℃, Span shift ±0.03%F.S./℃ ・Pressure range 5 to 990kPa

■SX-34 (direct pressure)

・Twice the sensor pressure resistance F.S. ・Pressure receiving part material Brass (BSB) ・Sensor accuracy ±1.0%F.S. ・Temperature characteristics Zero shift ±0.1%F.S./℃, Span shift ±0.1%F.S./℃ ・Pressure range 20 to 700kPa Negative pressure is only -100kPa, others are positive pressure.

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    Electropneumatic regulator APU series

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1 Models of Electropneumatic regulator APU series

Image Part Number Price (excluding tax) Purpose Flow rate (L/min) Negative pressure Flow rate (L/min) Positive pressure Connection size (Inch) Shape Valve structure Pressure range Operating power supply Control accuracy Gas used Orifice
Electropneumatic regulator APU series-Part Number-APU-508W

APU-508W

Available upon quote

・Reference pressure supply to pressure sensor
・Wafer test probing
・Silicon wafer polishing

0.4

1

Rc1/8

□50mm

3 way valve

-93kPa~990kPa

DC±15V (0.2A)

Absolute accuracy: Depends on the sensor used
Repeatability: ±0.1%F.S.

Clean and unchanging dry air
Recommended conditions: Compressed air cleanliness class 1,3,1 according to JIS B 8392-1:2012

Φ0.8

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About Company Handling This Product

FUKUDA CO., LTD.

Company Overview

Fukuda Co., Ltd. is a manufacturer of inspection equipment for industries such as automobiles, aircraft, elect...

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  • Japan

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Electro-Pneumatic Regulators
Electro-Pneumatic Regulators　FUKUDA CO., LTD.
FUKUDA CO., LTD.

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