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Thermal fluid analysis software PHOENICS CVD Package-PHOENICS CVD Package
Thermal fluid analysis software PHOENICS CVD Package-CHAM-Japan

Thermal fluid analysis software PHOENICS CVD Package
CHAM-Japan


About This Product

■Thermal fluid analysis software PHOENICS CVD

``CVD'' is an abbreviation for ``chemical vapor deposition.'' The literal translation is chemical vapor deposition reaction. This is called chemical vapor deposition. Chemical vapor deposition is a process used to manufacture semiconductor integrated circuits (ICs) that uses chemical reactions to coat a substrate with a thin film of silicon. Additionally, "CVD equipment" is a type of thin film forming equipment that deposits thin films of approximately 10 nm to 1000 nm on the surface of semiconductors. "PHOENICS CVD Package" can simulate a wide range of behavior inside "CVD manufacturing equipment".

■Thermal fluid analysis software PHOENICS CVD Package

"PHOENICS CVD Package" was developed by Siemens (Netherlands), Technical University of Delft (Delft University of Technology It was developed in cooperation with ASM International (Netherlands), Fraunhofer Institute (Germany), and others.

■Main features

・Flow, heat transfer and chemical reaction calculations in CVD equipment ・Compatible with plasma CVD (Drift-diffusion model) ・Supports multi-component mixed gas (physical property values ​​are automatically averaged) ・Thermal radiation analysis (view factor) ・Easy to understand menu function ・Abundant physical property value database ・Chemical reaction database (CHEMKIN)

■Basic functions

・Easy data setup using menu format ・Vapor deposition chemical reaction on solid surfaces ・Diffusion of multi-component mixed gas, thermal diffusion ・Plasma simulation using drift diffusion model

■Additional functions for parameter data files such as transport, thermodynamics, physical properties, chemical reactions, etc.

Easy addition due to “CHEMKIN” format

■Surface to Surface thermal radiation (radiation between surfaces)

-The radiation model includes surface-to-surface radiation based on view factors. ・Radiation effects are incorporated into the thermal coupling solution of existing energy equations.

  • Product

    Thermal fluid analysis software PHOENICS CVD Package

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1 Models of Thermal fluid analysis software PHOENICS CVD Package

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Thermal fluid analysis software PHOENICS CVD Package-Part Number-PHOENICS CVD Package

PHOENICS CVD Package

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