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  4. Ultra-low eccentricity rotary stage with a minimum eccentricity error of 20nm Air bearing rotary stage RT075S (Physics Technology Co., Ltd.)
Ultra-low eccentricity rotary stage with a minimum eccentricity error of 20nm Air bearing rotary stage RT075S-RT075S
Ultra-low eccentricity rotary stage with a minimum eccentricity error of 20nm Air bearing rotary stage RT075S-Physics Technology Co., Ltd.

Ultra-low eccentricity rotary stage with a minimum eccentricity error of 20nm Air bearing rotary stage RT075S
Physics Technology Co., Ltd.

About This Product

Physics Technology offers air bearing stages that are ideal for combination with SmarAct's small piezo stages. In particular, air bearing rotation stages have less eccentricity errors and can be controlled with less correction of errors caused by complicated rotations, which can lead to shorter control times.

■Air bearing rotating stage

The air bearing rotation stage is an ultra-low eccentric rotation stage with a minimum eccentricity error of 20 nm. We offer a wide variety of rotary table sizes depending on the load. It is used in a wide range of applications.

■Application used

Roundness measurement system, ultra-precision processing equipment, semiconductor related equipment, aspherical micromachining, micro/nano tomography, medical related equipment, laser microprocessing equipment

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    Ultra-low eccentricity rotary stage with a minimum eccentricity error of 20nm Air bearing rotary stage RT075S

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1 Models of Ultra-low eccentricity rotary stage with a minimum eccentricity error of 20nm Air bearing rotary stage RT075S

Image Part Number Price (excluding tax) Surface runout error Angular accuracy Load capacity Maximum speed Eccentricity error Plate diameter
Ultra-low eccentricity rotary stage with a minimum eccentricity error of 20nm Air bearing rotary stage RT075S-Part Number-RT075S

RT075S

Available upon quote

50nm

±13.8 arcsec

137N

300rpm

100nm

74mm

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Physics Technology Co., Ltd.

  • Japan

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