3-axis sensor/integrated displacement tilt sensor SH-3200-SH-3200

3-axis sensor/integrated displacement tilt sensor SH-3200
Katsura Opto Systems Co., LTD.

🏥 Medical Industry Use 🚀 Aerospace Industry Use 💻 Electronics & Electrical Use

About This Product

■Development backgroundIs it possible to measure displacement at the same time in addition to tilt measurement using the autocollimator method? This displacement and tilt sensor was developed based on customer requests.
We have developed an easy-to-use product that integrates the sensor head and processor unit and is also lightweight and compact, making it easy to integrate into equipment.

■Features1. Combining triangulation and autocollimator measurement methods
2. Sensor and processor integrated for faster measurement (1K data/s)
3. Simultaneous measurement of displacement and inclination [Patent No. 5330114]

■Application examples・Determination of wafer warpage during the manufacturing process
・Projector lens flange tilt and focus adjustment
・Inspection of tilt when driving lens actuator of camera module

Model
There is 1 model available for this product.

Product
3-axis sensor/integrated displacement tilt sensor SH-3200

Handling Company
Katsura Opto Systems Co., LTD.

Categories

Meters & Instruments

Autocollimators

Sensors

Tilt Sensors

Usage Scenarios
Medical Industry Use / Aerospace Industry Use / Electronics & Electrical Use

120+ people viewing

Last viewed: 23 hours ago

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1 Models of 3-axis sensor/integrated displacement tilt sensor SH-3200

Image	Part Number	Price (excluding tax)	Linearity	Repeatability	Digital output/output update rate	Beam diameter	Working distance	Signal output	Output	Output update rate	External dimensions (excluding protrusions)	Wavelength	Measurement target	Measuring range	Measurement items	Mass
	SH-3200	Available upon quote	±0.2% of F.S. (equivalent to ±0.36 minutes) ±0.1% of F.S. (equivalent to ±10μm)	0.009 min, 0.5 μm	RS-232C standard (compliant) / 1,000 times/sec	Φ0.2mm or less	50±0.5mm	RS-232C standard (compliant)	Class 1	1,000 times/second	W100×D80×H35mm	660±10nm	Optical plane mirror (Reflectance of 80% or more recommended)	±90 minutes (circular range), ±5mm	Tilt (ΘX,ΘY), displacement (Z)	0.33kg

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