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  4. ZVR Series Vertical and Rotary Integrated Stage for Wafer Positioning ZVR-PP (Japan Laser Co., Ltd.)
ZVR Series Vertical and Rotary Integrated Stage for Wafer Positioning ZVR-PP-ZVR-PP
ZVR Series Vertical and Rotary Integrated Stage for Wafer Positioning ZVR-PP-Japan Laser Co., Ltd.

ZVR Series Vertical and Rotary Integrated Stage for Wafer Positioning ZVR-PP
Japan Laser Co., Ltd.

Japan Laser Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

27.4hours

Relatively Fast Response

About This Product

■Features

・Ultra-thin design with 10mm of precision vertical movement and 360 degrees of continuous angular movement -Low mass and high natural frequency for quick step-and-settle applications Large diameter opening through the center of the stage allows easy management of vacuum and electrical cables to the chuck - Advanced management of all stage and chuck electrical and vacuum connections in one place ・Three-point mounting allows stable attachment to XY stages and other platforms. Newport's ZVR-PP and ZVR-PC are Z-vertical and theta-rotary positioning stages designed for precision lifting and rotation of 200 mm and/or 300 mm diameter wafer chucks. The ZVR stage firmly supports the load at three points (120 degree intervals) and drives it along the stage's periphery. Newport's three-point design is advantageous for applications such as wafer probing where the load may be slightly to severely unbalanced, creating vertical forces along the outer edge of the chuck. Angular deviations due to such off-center loads are minimized, so binding does not occur during vertical movement. Additionally, the ZVR stage has a unique design in which the opening in the center of the stage extends all the way to the bottom plate. Guidance of the stage along this vertical trajectory is accomplished by three compact, extremely quiet recirculating bearing guides. The ZVR also features a hardware origin that allows the stage to return to an absolute reference position (home position), and a limit switch that allows the user to set an upper limit on vertical movement.

  • Product

    ZVR Series Vertical and Rotary Integrated Stage for Wafer Positioning ZVR-PP

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1 Models of ZVR Series Vertical and Rotary Integrated Stage for Wafer Positioning ZVR-PP

Image Part Number Price (excluding tax)
ZVR Series Vertical and Rotary Integrated Stage for Wafer Positioning ZVR-PP-Part Number-ZVR-PP

ZVR-PP

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About Company Handling This Product

Japan Laser Co., Ltd.

Response Rate

100.0%

Response Time

27.4hrs

  • Japan

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