Clean room compatible regulator RS series Clean room compatible-RS-4-[ ]-KA
Clean room compatible regulator RS series Clean room compatible-Fujikura Composite Co., Ltd.

Clean room compatible regulator RS series Clean room compatible
Fujikura Composite Co., Ltd.


About This Product

■Clean room compatible regulator Category Overview Ultra-precision regulator for clean rooms ■RS series Clean room compatible Overview Ultra-precision regulator that can be used in clean room environments. ■Features This is an ultra-precision regulator for clean rooms that allows precise pressure adjustment because the pressure control method uses a servo balance method that uses a rolling diaphragm and a measuring capsule. ■Clean specifications The parts are made of stainless steel and fluorine rubber, and all other parts are electroless Ni plated, resulting in extremely low dust generation. ■Equipped with exhaust port Exhaust piping can be connected to the relief hole and bleed hole, allowing relief air and bleed air to be exhausted outside the clean room. ■Manifold compatible Manifold piping is possible. ■High precision Highly accurate pressure control is possible with sensitivity of 0.1%F.S. and repeatability of ±0.1%F.S. ■Long-term pressure stability Once the pressure is set, it is rarely set for a long period of time.

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    Clean room compatible regulator RS series Clean room compatible

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2 Models of Clean room compatible regulator RS series Clean room compatible

Items marked with have different values depending on the model number.

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Product Image Part Number Price (excluding tax) Air consumption ℓ/min (ANR) Bracket Fluid used Mass kg Operating temperature range Piping connection size Rc Presence or absence of relief Pressure gauge connection port size Rc Pressure setting range Mpa Primary pressure range Mpa Repeatability % F.S. Sensitivity % F.S.
Clean room compatible regulator RS series Clean room compatible-Part Number-RS-4-[ ]-KA

RS-4-[ ]-KA

Available upon quote Within 3.7 Equipped only with RS-[ ]-2-KA Compressed clean air 0.41 5~60 1/4, manifold Yes 1/4 (2 locations) 0.014~0.42 1 MAX Within ±0.1 Within 0.1
Clean room compatible regulator RS series Clean room compatible-Part Number-RS-8-[ ]-KA

RS-8-[ ]-KA

Available upon quote Within 3.7 Equipped only with RS-[ ]-2-KA Compressed clean air 0.41 5~60 1/4, manifold Yes 1/4 (2 locations) 0.014~0.84 1 MAX Within ±0.1 Within 0.1

Click on the part number for more information about each product

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