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  3. Ellipsometers
  4. Referenced Spectroscopic Ellipsometer: RSE (Park Systems Japan Co., Ltd.)
Referenced Spectroscopic Ellipsometer: RSE-Referenced Spectroscopic Ellipsometer: RSE
Referenced Spectroscopic Ellipsometer: RSE-Park Systems Japan Co., Ltd.

Referenced Spectroscopic Ellipsometer: RSE
Park Systems Japan Co., Ltd.

Park Systems Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.4hours

Relatively Fast Response

About This Product

The Referenced Spectroscopic Ellipsometer (RSE) is an ellipsometer-based reflectance meter designed for high-speed film thickness measurements in quality control and other applications. It is possible to accurately measure thicknesses from 0.1nm to 10μm. It records 200 spectra per second, can measure a 100mm x 100mm area in just 12 minutes, and can acquire 67,000 spectra.

■Features

・Reference spectroscopic ellipsometry measurement in one measurement ・Measurement speed of 200 spectra/second ・Live data processing for film thickness evaluation ・Spot size: 50x100 µm spot size (at AOI = 60°) ・Film thickness range <1nm-10µm ・Spectral range 450-900nm

■Summary

RSE is a special ellipsometer that compares a sample to a reference. This allows you to measure small optical differences between sample and reference. The reference orientation allows high-resolution spectra to be obtained in a single measurement without the need to move or modulate optical components during the measurement. It is possible to acquire 200 spectra per second. A synchronized X-Y stage allows large-area film thickness maps to be obtained within minutes.

  • Product

    Referenced Spectroscopic Ellipsometer: RSE

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1 Models of Referenced Spectroscopic Ellipsometer: RSE

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Referenced Spectroscopic Ellipsometer: RSE-Part Number-Referenced Spectroscopic Ellipsometer: RSE

Referenced Spectroscopic Ellipsometer: RSE

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About Company Handling This Product

Park Systems Japan Co., Ltd.

Response Rate

100.0%

Response Time

26.4hrs

  • Japan

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Ellipsometers
Ellipsometers　Park Systems Japan Co., Ltd.
Park Systems Japan Co., Ltd.

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