Referenced Spectroscopic Ellipsometer: RSE
Park Systems Japan Co., Ltd.
About This Product
The Referenced Spectroscopic Ellipsometer (RSE) is an ellipsometer-based reflectance meter designed for high-speed film thickness measurements in quality control and other applications. It is possible to accurately measure thicknesses from 0.1nm to 10μm. It records 200 spectra per second, can measure a 100mm x 100mm area in just 12 minutes, and can acquire 67,000 spectra.
■Features
・Reference spectroscopic ellipsometry measurement in one measurement
・Measurement speed of 200 spectra/second
・Live data processing for film thickness evaluation
・Spot size: 50x100 µm spot size (at AOI = 60°)
・Film thickness range <1nm-10µm
・Spectral range 450-900nm
■Summary
RSE is a special ellipsometer that compares a sample to a reference. This allows you to measure small optical differences between sample and reference. The reference orientation allows high-resolution spectra to be obtained in a single measurement without the need to move or modulate optical components during the measurement.
It is possible to acquire 200 spectra per second. A synchronized X-Y stage allows large-area film thickness maps to be obtained within minutes.
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Product
Referenced Spectroscopic Ellipsometer: RSE
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Handling Company
Park Systems Japan Co., Ltd.
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Categories
1 Models of Referenced Spectroscopic Ellipsometer: RSE
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Referenced Spectroscopic Ellipsometer: RSE |
Available upon quote |
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