All Categories

History

  1. Metoree
  2. Observation Equipment
  3. Atomic Force Microscopes
  4. Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology (Park Systems Japan Co., Ltd.)
Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology-NX-Hybrid WLI
Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology-Park Systems Japan Co., Ltd.

Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology
Park Systems Japan Co., Ltd.

Park Systems Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.4hours

Relatively Fast Response

About This Product

Park NX-Hybrid WLI is the world's first AFM system with a built-in white light interferometer for measurement, quality assurance, front-end process control, and back-end advanced package management in semiconductor device R&D/production sites. is. With sub-nano resolution and ultra-high precision, it is possible to zoom in to the nanoscale region, enabling high-throughput measurements over an extremely wide range.

■Fusion of two technologies ideal for semiconductor measurement

・White light interferometer (WLI) White light interferometry is an optical technology that can measure large areas at high speed, making it possible to perform measurements with unprecedented high throughput. ・Atomic force microscope (AFM) Atomic force microscopy is a scanning probe technology that can measure even transparent materials with the highest resolution on the nanoscale.

■WLI applications that require high resolution and precision that far exceed the capabilities of conventional WLI

・Advanced CMP measurement and monitoring ・Advanced packaging ・Hot spot and defect detection on die reticle ・Wafer level measurement

■AFM applications requiring wider measurement range and higher throughput

・Inline, wafer measurement ・Long range for CMP characteristic evaluation, profiling ・Sub-angstrom surface roughness control ・Wafer inspection and analysis

■Features

・Supports WLI mode and PSI mode (PSI mode supports electric filter changer) ・Available objective lens magnification: 2.5X, 10X, 20X, 50X, 100X ・Two objective lenses can be switched automatically using the electric linear lens changer. - The height of the sample surface at each pixel can be calculated from the change in light intensity due to interference while scanning the height of the Mirau objective lens. -White light interferometry (WLI) and phase shift interferometry (PSI) are commonly used techniques for surface characterization.

  • Product

    Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology

Share this product


220+ people viewing

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology

Image Part Number Price (excluding tax)
Park NX-Hybrid WLI, the world's first hybrid semiconductor measurement device that combines atomic force microscope and white light interference technology-Part Number-NX-Hybrid WLI

NX-Hybrid WLI

Available upon quote

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Atomic force microscope (material AFM) large platform Dimension series-Bruker Corporation

Atomic force microscope (material AFM) large platform Dimension series

Bruker Corporation

480+ people viewing

Last viewed: 1 minute ago

Response time: 26.94 hours

Atomic Force Microscopes

24 models listed

Park FX40 automated atomic force microscope equipped with next-generation new features-Park Systems Japan Co., Ltd.

Park FX40 automated atomic force microscope equipped with next-generation new features

Park Systems Japan Co., Ltd.

230+ people viewing

Response time: 26.42 hours

Atomic Force Microscopes
Atomic force microscope (material AFM) small platform-Bruker Corporation

Atomic force microscope (material AFM) small platform

Bruker Corporation

330+ people viewing

Last viewed: 5 minutes ago

Response time: 26.94 hours

Atomic Force Microscopes

6 models listed

The most accurate and easy-to-use atomic force microscope (AFM) Park NX10-Park Systems Japan Co., Ltd.

The most accurate and easy-to-use atomic force microscope (AFM) Park NX10

Park Systems Japan Co., Ltd.

300+ people viewing

Last viewed: 5 hours ago

Response time: 26.42 hours

Atomic Force Microscopes

2 models listed

The most economical research grade AFM Park NX7 with flexible sample handling-Park Systems Japan Co., Ltd.

The most economical research grade AFM Park NX7 with flexible sample handling

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 19 minutes ago

Response time: 26.42 hours

Atomic Force Microscopes

2 models listed

Bio AFM (Atomic Force Microscope) Automated Force Spectroscopy-Bruker Corporation

Bio AFM (Atomic Force Microscope) Automated Force Spectroscopy

Bruker Corporation

360+ people viewing

Last viewed: 1 hour ago

Response time: 26.94 hours

Atomic Force Microscopes

6 models listed

Park NX12 is a versatile microscopy platform for analytical chemists and public facilities.-Park Systems Japan Co., Ltd.

Park NX12 is a versatile microscopy platform for analytical chemists and public facilities.

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 5 hours ago

Response time: 26.42 hours

Atomic Force Microscopes
Bio AFM (atomic force microscope) optical tweezers-Bruker Corporation

Bio AFM (atomic force microscope) optical tweezers

Bruker Corporation

290+ people viewing

Last viewed: 1 hour ago

Response time: 26.94 hours

Atomic Force Microscopes

4 models listed

Automated nanometer measurement equipment for wafer measurement and analysis Park NX20 300mm-Park Systems Japan Co., Ltd.

Automated nanometer measurement equipment for wafer measurement and analysis Park NX20 300mm

Park Systems Japan Co., Ltd.

220+ people viewing

Last viewed: 1 minute ago

Response time: 26.42 hours

Atomic Force Microscopes
Nanoscale infrared spectroscopy system-Bruker Corporation

Nanoscale infrared spectroscopy system

Bruker Corporation

360+ people viewing

Last viewed: 1 hour ago

Response time: 26.94 hours

Atomic Force Microscopes

12 models listed

Specifying the sample observation location and positioning the cantilever is possible alpha300A–AFM atomic force microscope-Oxford Instruments Ltd.

Specifying the sample observation location and positioning the cantilever is possible alpha300A–AFM atomic force microscope

Oxford Instruments Ltd.

300+ people viewing

Last viewed: 5 hours ago

Response time: 24.98 hours

Atomic Force Microscopes

2 models listed

Park NX20 is the most advanced nano-shape measurement tool for failure analysis and research and development on large samples.-Park Systems Japan Co., Ltd.

Park NX20 is the most advanced nano-shape measurement tool for failure analysis and research and development on large samples.

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 6 minutes ago

Response time: 26.42 hours

Atomic Force Microscopes
See More Atomic Force Microscopes Products

Other products of Park Systems Japan Co., Ltd.

Reviews shown here are reviews of companies.

Park FX40 automated atomic force microscope equipped with next-generation new features-Park Systems Japan Co., Ltd.

Park FX40 automated atomic force microscope equipped with next-generation new features

Park Systems Japan Co., Ltd.

230+ people viewing

Response time: 26.42 hours

Atomic Force Microscopes
The most accurate and easy-to-use atomic force microscope (AFM) Park NX10-Park Systems Japan Co., Ltd.

The most accurate and easy-to-use atomic force microscope (AFM) Park NX10

Park Systems Japan Co., Ltd.

300+ people viewing

Last viewed: 5 hours ago

Response time: 26.42 hours

Scanning Probe Microscopes

2 models listed

The most economical research grade AFM Park NX7 with flexible sample handling-Park Systems Japan Co., Ltd.

The most economical research grade AFM Park NX7 with flexible sample handling

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 19 minutes ago

Response time: 26.42 hours

Scanning Probe Microscopes

2 models listed

Park NX12 is a versatile microscopy platform for analytical chemists and public facilities.-Park Systems Japan Co., Ltd.

Park NX12 is a versatile microscopy platform for analytical chemists and public facilities.

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 5 hours ago

Response time: 26.42 hours

Atomic Force Microscopes
Automated nanometer measurement equipment for wafer measurement and analysis Park NX20 300mm-Park Systems Japan Co., Ltd.

Automated nanometer measurement equipment for wafer measurement and analysis Park NX20 300mm

Park Systems Japan Co., Ltd.

220+ people viewing

Last viewed: 1 minute ago

Response time: 26.42 hours

Atomic Force Microscopes
Park NX20 is the most advanced nano-shape measurement tool for failure analysis and research and development on large samples.-Park Systems Japan Co., Ltd.

Park NX20 is the most advanced nano-shape measurement tool for failure analysis and research and development on large samples.

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 6 minutes ago

Response time: 26.42 hours

Atomic Force Microscopes
Significantly improve productivity with highly versatile AFM Park NX20 Lite-Park Systems Japan Co., Ltd.

Significantly improve productivity with highly versatile AFM Park NX20 Lite

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 5 hours ago

Response time: 26.42 hours

Scanning Probe Microscopes

2 models listed

Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac-Park Systems Japan Co., Ltd.

Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac

Park Systems Japan Co., Ltd.

140+ people viewing

Response time: 26.42 hours

Standard sample for calibration of atomic force microscope AFM Tip Characterizer (AFMTC)-Park Systems Japan Co., Ltd.

Standard sample for calibration of atomic force microscope AFM Tip Characterizer (AFMTC)

Park Systems Japan Co., Ltd.

140+ people viewing

Response time: 26.42 hours

Calibration standard sample for scanning electron microscopy measurements High Magnification Calibrator (HMC)-Park Systems Japan Co., Ltd.

Calibration standard sample for scanning electron microscopy measurements High Magnification Calibrator (HMC)

Park Systems Japan Co., Ltd.

120+ people viewing

Response time: 26.42 hours

Nanoscale infrared spectrometer Park NX-IR for chemical analysis and materials imaging-Park Systems Japan Co., Ltd.

Nanoscale infrared spectrometer Park NX-IR for chemical analysis and materials imaging

Park Systems Japan Co., Ltd.

210+ people viewing

Last viewed: 1 minute ago

Response time: 26.42 hours

Atomic Force Microscopes

3 models listed

Nanoscale infrared spectroscopy system for 300mm semiconductor wafer Park NX-IR R300-Park Systems Japan Co., Ltd.

Nanoscale infrared spectroscopy system for 300mm semiconductor wafer Park NX-IR R300

Park Systems Japan Co., Ltd.

190+ people viewing

Last viewed: 3 hours ago

Response time: 26.42 hours

Infrared Spectrophotometers

View more products of Park Systems Japan Co., Ltd.

About Company Handling This Product

Park Systems Japan Co., Ltd.

Response Rate

100.0%

Response Time

26.4hrs

  • Japan

Related search keywords

Atomic Force Microscopes
Atomic Force Microscopes　Park Systems Japan Co., Ltd.
Park Systems Japan Co., Ltd.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2025 Metoree