AFM Park NX-HDM ideal for media and board manufacturing
Park Systems Japan Co., Ltd.
About This Product
Identifying nanoscale defects is a very time-consuming process for engineers working with media and flat substrates. Park NX-HDM is an atomic force microscopy inspection system that significantly speeds up the defect review process with automated defect identification, scanning, and analysis. Park NX-HDM links directly with a variety of optical inspection tools, greatly increasing throughput for automated defect review.
Additionally, Park NX-HDM delivers accurate sub-Angstrom surface roughness measurements with every scan, no matter how many times it is scanned. With the industry's lowest noise floor and unique True Non-Contact™ technology, the Park NX-HDM is also the most accurate AFM for surface roughness measurements on the market.
■High throughput, automatic defect review
Identifying nanoscale defects is a very time-consuming process for engineers working with media and flat substrates. Park NX-HDM is an atomic force microscopy inspection system that significantly speeds up the defect review process with automated defect identification, scanning, and analysis.
Park NX-HDM links directly to a variety of optical inspection tools, greatly increasing throughput for automated defect review.
■Sub-A surface roughness measurement
To accommodate ever-shrinking device dimensions, the industry is increasingly demanding ultra-flat media and substrates. Park NX-HDM provides accurate sub-Angstrom surface roughness measurements scan after scan, no matter how many scans you perform.
With the industry's lowest noise floor and unique True Non-Contact™ technology, the Park NX-HDM is also the most accurate AFM for surface roughness measurements on the market.
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AFM Park NX-HDM ideal for media and board manufacturing
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Handling Company
Park Systems Japan Co., Ltd.
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1 Models of AFM Park NX-HDM ideal for media and board manufacturing
| Product Image | Part Number | Price (excluding tax) | ADC | Acoustic enclosure | Acoustic noise | COGNEX pattern recognition | Ceiling height | Control cabinet | DAC | Electric XY stage | Electric Z stage | Equipment conditions Humidity | Equipment conditions Room temperature (in operation) | Equipment conditions Room temperature (standby temperature) | Exhaust system | Floor vibration level | Floor vibration noise | Full Z scan range | Ground resistance value | Maximum scan size | Motorized focus stage | Operator work space | Power supply | Specimen tolerance thickness range | System floor space | Total power consumption | XY scanner range | XY scanner resolution | Z scanner range | Z scanner resolution |
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NX-HDM |
Available upon quote | 18 channels, 4 high-speed ADC channels (64MSPS), 24-bit ADC (X, Y and Z scanner position sensor) | 880 (w) ×980 (d) ×1,460 (h), 620kg approx. (incl. basic NX-HDM System) | 65dB or less, >20dB reduction (due to acoustic enclosure) | Pattern alignment resolution: 1/4 pixel | 2,000mm or more | 600 (w) ×900 (d) ×1,600 (h), 170kg approx. (incl. controllers) | 17 channels, 2 high-speed DAC channels (64 MSPS), 20-bit DAC (X, Y and Z scanner position sensor) | Driving range: max. 150mm x 150mm, repeatability 2μm | Z drive range 25mm, resolution 0.1μm, repeatability <1μm | 30%to60% (not condensing) | 18℃~24℃ | 10℃~40℃ | Vacuum: -60kPa | VC-D standard (6μm/sec) | <0.5 μm/s (10Hz~200Hzw/active anti-vibration table system) | Z clearance<2nm | 100 ohms or less | 4,096x4,096 pixels | Direct optical, Z drive range 15mm | 2,400mm (width) x 2,450mm (depth), minimum | 100/120V/ 208~240V, single phase, 15A (max) | Max 20mm | 1,720mm (width) x 920mm (depth) | 2KW (nominal value) | 100μm×100μm | 0.095nm (20-bit position control) | 15μm | 0.01nm |
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