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AFM Park NX-HDM ideal for media and board manufacturingHandling Company
Park Systems Japan Co., Ltd.Categories
| Image | Part Number | Price (excluding tax) | Acoustic noise | Power supply | Motorized focus stage | Electric Z stage | Electric XY stage | Specimen tolerance thickness range | Equipment conditions Humidity | Equipment conditions Room temperature (in operation) | Equipment conditions Room temperature (standby temperature) | Total power consumption | Maximum scan size | Exhaust system | Floor vibration level | Floor vibration noise | Ceiling height | Control cabinet | Full Z scan range | System floor space | Ground resistance value | Operator work space | Acoustic enclosure | Z scanner resolution | Z scanner range | XY scanner resolution | XY scanner range | DAC | COGNEX pattern recognition | ADC |
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NX-HDM |
Available upon quote |
65dB or less, >20dB reduction (due to acoustic enclosure) |
100/120V/ 208~240V, single phase, 15A (max) |
Direct optical, Z drive range 15mm |
Z drive range 25mm, resolution 0.1μm, repeatability <1μm |
Driving range: max. 150mm x 150mm, repeatability 2μm |
Max 20mm |
30%to60% (not condensing) |
18℃~24℃ |
10℃~40℃ |
2KW (nominal value) |
4,096x4,096 pixels |
Vacuum: -60kPa |
VC-D standard (6μm/sec) |
<0.5 μm/s (10Hz~200Hzw/active anti-vibration table system) |
2,000mm or more |
600 (w) ×900 (d) ×1,600 (h), 170kg approx. (incl. controllers) |
Z clearance<2nm |
1,720mm (width) x 920mm (depth) |
100 ohms or less |
2,400mm (width) x 2,450mm (depth), minimum |
880 (w) ×980 (d) ×1,460 (h), 620kg approx. (incl. basic NX-HDM System) |
0.01nm |
15μm |
0.095nm (20-bit position control) |
100μm×100μm |
17 channels, 2 high-speed DAC channels (64 MSPS), 20-bit DAC (X, Y and Z scanner position sensor) |
Pattern alignment resolution: 1/4 pixel |
18 channels, 4 high-speed ADC channels (64MSPS), 24-bit ADC (X, Y and Z scanner position sensor) |
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Reviews shown here are reviews of companies.
