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  4. AFM Park NX-HDM ideal for media and board manufacturing (Park Systems Japan Co., Ltd.)
AFM Park NX-HDM ideal for media and board manufacturing-NX-HDM
AFM Park NX-HDM ideal for media and board manufacturing-Park Systems Japan Co., Ltd.

AFM Park NX-HDM ideal for media and board manufacturing
Park Systems Japan Co., Ltd.

Park Systems Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.4hours

Relatively Fast Response

About This Product

Identifying nanoscale defects is a very time-consuming process for engineers working with media and flat substrates. Park NX-HDM is an atomic force microscopy inspection system that significantly speeds up the defect review process with automated defect identification, scanning, and analysis. Park NX-HDM links directly with a variety of optical inspection tools, greatly increasing throughput for automated defect review. Additionally, Park NX-HDM delivers accurate sub-Angstrom surface roughness measurements with every scan, no matter how many times it is scanned. With the industry's lowest noise floor and unique True Non-Contact™ technology, the Park NX-HDM is also the most accurate AFM for surface roughness measurements on the market.

■High throughput, automatic defect review

Identifying nanoscale defects is a very time-consuming process for engineers working with media and flat substrates. Park NX-HDM is an atomic force microscopy inspection system that significantly speeds up the defect review process with automated defect identification, scanning, and analysis. Park NX-HDM links directly to a variety of optical inspection tools, greatly increasing throughput for automated defect review.

■Sub-A surface roughness measurement

To accommodate ever-shrinking device dimensions, the industry is increasingly demanding ultra-flat media and substrates. Park NX-HDM provides accurate sub-Angstrom surface roughness measurements scan after scan, no matter how many scans you perform. With the industry's lowest noise floor and unique True Non-Contact™ technology, the Park NX-HDM is also the most accurate AFM for surface roughness measurements on the market.

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    AFM Park NX-HDM ideal for media and board manufacturing

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1 Models of AFM Park NX-HDM ideal for media and board manufacturing

Image Part Number Price (excluding tax) Acoustic noise Power supply Motorized focus stage Electric Z stage Electric XY stage Specimen tolerance thickness range Equipment conditions Humidity Equipment conditions Room temperature (in operation) Equipment conditions Room temperature (standby temperature) Total power consumption Maximum scan size Exhaust system Floor vibration level Floor vibration noise Ceiling height Control cabinet Full Z scan range System floor space Ground resistance value Operator work space Acoustic enclosure Z scanner resolution Z scanner range XY scanner resolution XY scanner range DAC COGNEX pattern recognition ADC
AFM Park NX-HDM ideal for media and board manufacturing-Part Number-NX-HDM

NX-HDM

Available upon quote

65dB or less, >20dB reduction (due to acoustic enclosure)

100/120V/ 208~240V, single phase, 15A (max)

Direct optical, Z drive range 15mm

Z drive range 25mm, resolution 0.1μm, repeatability <1μm

Driving range: max. 150mm x 150mm, repeatability 2μm

Max 20mm

30%to60% (not condensing)

18℃~24℃

10℃~40℃

2KW (nominal value)

4,096x4,096 pixels

Vacuum: -60kPa

VC-D standard (6μm/sec)

<0.5 μm/s (10Hz~200Hzw/active anti-vibration table system)

2,000mm or more

600 (w) ×900 (d) ×1,600 (h), 170kg approx. (incl. controllers)

Z clearance<2nm

1,720mm (width) x 920mm (depth)

100 ohms or less

2,400mm (width) x 2,450mm (depth), minimum

880 (w) ×980 (d) ×1,460 (h), 620kg approx. (incl. basic NX-HDM System)

0.01nm

15μm

0.095nm (20-bit position control)

100μm×100μm

17 channels, 2 high-speed DAC channels (64 MSPS), 20-bit DAC (X, Y and Z scanner position sensor)

Pattern alignment resolution: 1/4 pixel

18 channels, 4 high-speed ADC channels (64MSPS), 24-bit ADC (X, Y and Z scanner position sensor)

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About Company Handling This Product

Park Systems Japan Co., Ltd.

Response Rate

100.0%

Response Time

26.4hrs

  • Japan

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