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Response Rate
100.0%
Response Time
26.4hours
Relatively Fast Response
Product
Fully automatic industrial AFM Park NX-3DM for high-resolution 3D metrologyHandling Company
Park Systems Japan Co., Ltd.Categories
| Image | Part Number | Price (excluding tax) | Electric angle range | Electric focus stage | Electric Z stage | Electric XY stage | Equipment conditions Acoustic noise | Equipment conditions Power supply | Equipment conditions Total power consumption | Equipment conditions Humidity | Equipment conditions Exhaust system | Equipment conditions Floor vibration level | Equipment conditions Room temperature (during operation) | Equipment conditions Room temperature (standby) | Equipment conditions Ground resistance | Z scanner | XY scanner resolution | XY scanner | COGNEX pattern recognition | 300mm system ceiling height | 300mm system work space | 300mm system | 200mm system ceiling height | 200mm system work space | 200mm system |
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NX-3DM |
Available upon quote |
19 degrees and +19 degrees, -38 degrees and +38 degrees, angle repeatability: <0.5 degrees |
Z travel distance: 9mm, direct optical system |
Z travel distance: 27mm, resolution: 0.08㎛, repeatability: <1㎛ |
200mm: Moves up to 275mmx200mm, Resolution: 0.5㎛/300 mm: Moves up to 400mmx300mm, Resolution: 0.5㎛ |
65dB or less |
208V-240V, single phase, 15A (max) |
2KW (nominal) |
30%~60% (without condensing) |
Vacuum: -80kPa, CDA (or N2): 0.7MPa |
VC-D (6μm/sec) |
18℃~24℃ |
10℃~40℃ |
100 ohms or less |
Z scanner range: 15 ㎛ (large mode), 2 ㎛ (small mode) /Z scanner resolution: 0.016 nm (large mode), 0.002 nm (small mode), etc. |
0.28nm (large mode), 0.03nm (small mode) |
Single module flexure XY scanner with closed-loop control, 100 µm x 100 µm (large mode), 50 µm x 50 µm (medium mode), 10 µm x 10 µm (small mode) |
Pattern alignment resolution 1/4 pixel |
2,500mm or more |
4,540mm (width) x2,850mm (back), minimum |
1,840mm (width) x 1,170mm (back) x 2,050mm (height), without EFEM, approximately 1,320 kg (with control cabinet), etc. |
2,500mm or more |
3,300mm (width) x2,300mm (back), minimum |
1,500mm (width) x 980mm (back) x 2,050mm (height), without EFEM, approximately 1,020 kg (with control cabinet), etc. |
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
26.4hrs
