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The only AFM for wafer fabs with automatic defect inspection function Park NX-WaferHandling Company
Park Systems Japan Co., Ltd.Categories
| Image | Part Number | Price (excluding tax) | Acoustic noise | Electric focus stage | Electric Z stage | Electric XY stage | Sample thickness tolerance range | Equipment conditions Acoustic noise | Equipment conditions Power supply | Equipment conditions Total power consumption | Equipment conditions Humidity | Equipment conditions Exhaust system | Equipment conditions Floor vibration level | Equipment conditions Room temperature (during operation) | Equipment conditions Room temperature (standby) | Equipment conditions Ground resistance | Floor vibration noise | All scan range Z clearance | Z scanner detector noise | Z scanner resolution | Z scanner range | XY scanner resolution | XY scanner range | DAC | COGNEX pattern recognition | C.E. | ADC | 300mm system layout | 200mm system layout |
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NX-Wafer |
Available upon quote |
>20dB reduction (using acoustic enclosure) |
Z driving distance 9mm, direct optical system |
Z driving distance 25mm, resolution 0.08μm, repeatability <1μm |
200mm: Drive 275mm x 200mm, resolution 0.5μm/300mm: Drive 400mm x 300mm, resolution 0.5μm |
Max 20mm |
65dB or less |
208V-240V, single phase, 15A (max) |
2KW (nominal) |
30%~60% (no condensation) |
Vacuum: -80kPa, CDA (orN2): 0.7MPa |
VC-D standard (6μm/sec) |
18℃~24℃ |
10℃~40℃ |
100 ohms or less |
<0.5μm/s (10Hz~200Hz, using active vibration isolation table) |
<2nm, repeatability <1nm |
0.03nm, rms (typical) |
0.016nm (Large mode), 0.002nm (Small mode) |
15µm (Large mode), 2µm (Small mode) |
0.15nm (Large mode) |
100μm×100μm (Large mode), 50μm×50μm (Medium mode), 10μm×10μm (Small mode) |
17 channels, 2 high-speed DAC channels (64 MSPS), 20-bit DAC (X, Y and Z scanner position sensor) |
Pattern alignment resolution 1/4 pixel |
SEMI Standard S2/S8 |
18 channels, 4 high-speed ADC channels (64 MSPS), 24-bit ADC (X, Y and Z scanner position sensor) |
3,486mm (width) x 1,450mm (depth) x 2,400mm (height), approximately 2,950kg (including control cabinet), ceiling height 2,500mm or less, etc. |
2,732mm (width) x 1,100mm (depth) x 2,400mm (height), approximately 2,110kg (including control cabinet), ceiling height 2,500mm or less, etc. |
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Reviews shown here are reviews of companies.
