Significantly improve productivity with highly versatile AFM Park NX20 Lite
Park Systems Japan Co., Ltd.
About This Product
The Park NX20 Lite has many unique features that make it ideal for collaborative laboratories, multivariate analysis, and wafer failure analysis. In addition, its reasonable pricing and extensive functionality make it one of the industry's most economical AFMs for large samples.
■Easy sample measurement with multi-sample scan
・Automatic imaging of multiple samples in one measurement
・Multi-sample chuck that can hold up to 16 samples (optional)
・Motor-driven XY stage that can move up to 150mmx150mm
■Accurate XY scan by eliminating crosstalk
・Two independent closed-loop XY and Z flexure Z scanners
・Flat and orthogonal XY scan reduces curvature
・High-precision measurement that does not require software correction
■Best tip life, resolution, and sample preservation with true non-contact™ mode
・Realization of true non-contact™ mode with high-speed Z servo
・Minimize tip wear and achieve high-quality, high-resolution imaging for a long period of time
■Various modes and options
・Comprehensive measurement modes and characterization
- Expand functionality with optional accessories and upgrades
・Advanced electrical measurements for failure analysis (FA)
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Product
Significantly improve productivity with highly versatile AFM Park NX20 Lite
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Handling Company
Park Systems Japan Co., Ltd.
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Categories
1 Models of Significantly improve productivity with highly versatile AFM Park NX20 Lite
| Product Image | Part Number | Price (excluding tax) | Electric XY stage drive range | Electric Z stage drive range | Sample size | XY scanner scan range | Z scanner scan range |
|---|---|---|---|---|---|---|---|
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NX20 Lite |
Available upon quote | 150mm (200mm optional) (optional high-precision encoder to improve repeatability of XY stage) | 25.5mm (optional high-precision encoder to improve stage repeatability) | Wafer up to 150mm, wafer up to 200mm (optional; 200mm vacuum sample chuck) | 100μm×100μm | 15μm (30μm as option) |
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